Bulk-micromachined VCSEL At 1.55 μm With 76-nm single-mode continuous tuning range

IEEE Photonics Technology Letters

Volumn 21, Issue 24, 2009, Pages 1822-1824

  Jatta, S ^a   Kogel B ^a   Maute, M ^b   Zogal, K ^a   Riemenschneider, F ^a   Bohm G ^b   Amann, M C ^b   Meissner P ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b WALTER SCHOTTKY INSTITUT   (Germany)

Author keywords

Bulk micromachined; Dielectric; Microelectromechanical systems (MEMS); Microoptoelectromechanical system (MOEMS); Semiconductor laser; Tunable vertical cavity surface emitting laser (VCSEL)

Indexed keywords

BULK-MICROMACHINED; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICROELECTROMECHANICAL SYSTEMS; MICROELECTROMECHANICAL SYSTEMS (MEMS); VERTICAL-CAVITY SURFACE EMITTING LASER;

COMPOSITE MICROMECHANICS; DIELECTRIC MATERIALS; LASERS; MECHATRONICS; MICROELECTROMECHANICAL DEVICES; MOEMS; SEMICONDUCTOR LASERS; SURFACES; TUNING;

SURFACE EMITTING LASERS;

EID: 73049092188     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2009.2034272     Document Type: Article

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