Monolithic integrated piezoelectric MEMS-tunable VCSEL

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 13, Issue 2, 2007, Pages 374-379

  Huang, Michael C Y ^a,b   Cheng, Kan Bun ^c   Zhou, Ye ^a,b   Pisano, Albert P ^c   Chang Hasnain, Connie J ^a,b  

^a IEEE   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Laser tuning; Microelectromechanical systems (MEMS); Tunable optoelectronic devices; Vertical cavity surface emitting laser (VCSEL)

Indexed keywords

ELECTRICAL DAMAGE; PIEZOELECTRIC ACTUATION; SINGLE MODE EMISSION; THERMAL ACTUATION;

LASER TUNING; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; OPTOELECTRONIC DEVICES; PIEZOELECTRIC DEVICES; SURFACE EMITTING LASERS;

MEMS;

EID: 34247550404     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2007.894056     Document Type: Article

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