Electro thermal and electro statical actuation of a surface micromachined tunable Fabry-Pérot filter

2011 Conference on Lasers and Electro-Optics: Laser Science to Photonic Applications, CLEO 2011

Volumn , Issue , 2011, Pages

  Gierl, C ^a   Zogal, K ^a   Davani, H A ^a   Meissner, P ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MASS PRODUCTION; MICROMACHINED; ON-WAFER; ROT FILTER; STANDARD SINGLE MODE FIBERS; TUNING RANGES;

SINGLE MODE FIBERS;

OPTICS;

EID: 80052104736     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Halbritter, H. et al., "Performance evaluation of WDM components based on tunable dielectric membrane technology," Circuits, Devices and Systems, IEE Proceedings -, vol.150, no.6, pp. 501-505, 4 Dec. 2003
2. Chang-Kyu Kim et al., "Electrothermally actuated Fabry-Pérot tunable filter with a high tuning efficiency," Photonics Technology Letters, IEEE, vol.16, no.8, pp.1894-1896, Aug. 2004
3. S. D. Senturia, Microsystem Design, Kluwer Academic Press, New York, NY, 2000.