Role of the active layer thickness on the sensitivity of WO3 gas sensors

International Journal of Nanotechnology

Volumn 9, Issue 3-7, 2012, Pages 471-479

  Aguir, K ^a   Guerin J ^a   Mliki, N ^b   Bendahan, M ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b FACULTÉ DES SCIENCES DE TUNIS   (Tunisia)

Author keywords

Cobalt nanograins; Metallic oxide gas sensors; Modelling; Ozone; Selectivity

Indexed keywords

CATALYST SELECTIVITY; CHEMICAL SENSORS; COBALT COMPOUNDS; COPPER OXIDES; GAS DETECTORS; II-VI SEMICONDUCTORS; MAGNETIC SEMICONDUCTORS; METALS; MODELS; OZONE; POLYCRYSTALLINE MATERIALS; THICK FILMS; TUNGSTEN COMPOUNDS; WIDE BAND GAP SEMICONDUCTORS; ZINC OXIDE;

FABRICATION TECHNIQUE; METALLIC OXIDE GAS SENSORS; NANO GRAINS; POLYCRYSTALLINE; RESPONSE STABILITY; SEMICONDUCTING OXIDE; SENSITIVE LAYERS; SENSITIVE MATERIALS;

SEMICONDUCTING TIN COMPOUNDS;

EID: 84857160957     PISSN: 14757435     EISSN: None     Source Type: Journal    
DOI: 10.1504/IJNT.2012.045349     Document Type: Article

References (23)

1. Schierbaum, K., Weimar, U. and Göpel, W. (1990) 'Multicomponent gas analysis: an analytical chemistry approach applied to modified SnO2 sensors', Sens. Actuators, B, Vol. 2, pp.71-78. (Pubitemid 20696682)
2. Yamazoe, N. (1991) 'New approaches for improving semiconductor gas sensors', Sens. Actuators, B, Vol. 5, pp.7-19.
3. Göpel, W. (1985) 'Chemisorption and charge transfer at ionic semiconductor surfaces: implication in designing gas sensors', Prog. Surf. Sci., Vol. 20, pp.9-103. (Pubitemid 16456826)
4. Moseley, P. and Tofield, B. (1987) Solid State Gas Sensors, Adam Hilger, Bristol, UK.
5. Bendahan, M., Boulmani, R., Seguin, J.L. and Aguir, K. (2004) 'Characterization of ozone sensors based on WO3 reactively sputtered films: influence of O2 concentration in the sputtering gas, and working temperature', Sens. Actuators, B, Vol. 100, pp.320-324.
6. Shimizu, Y. and Egashira, M. (1999) 'Basic aspects and challenges of semiconductor gas sensors', MRS Bull., Vol. 24, pp.18-24.
7. Yamazoe, N., Sakai, G. and Shimanoe, K. (2003) 'Oxide semiconductor gas sensors', Catal. Surv. Asia, Vol. 7, pp.63-75. (Pubitemid 38076840)
8. Regragui, M., Jousseaume, V., Addou, M., Outzourhit, A., Bernéde, J.C. and El Idrissi, B. (2001) 'Electrical and optical properties of WO3 thin films', Thin Solid Films, Vol. 397, pp.238-243. (Pubitemid 32975745)
9. Aguir, K., Lemire, C. and Lollman, D.B.B. (2002) 'Electrical properties of reactively sputtered WO3 thin films as ozone gas sensor', Sens. Actuators, B, Vol. 84, pp.1-5. (Pubitemid 34532371)
10. Dwyer, D.J. (1991) 'Surface chemistry of gas sensors: H2S on WO3 films', Sens. Actuators, B, Vol. 5, pp.155-159.
11. Sberveglieri, G., Depero, L.E., Groppelli, S. and Nelli, P. (2002) 'WO3 sputtered thin films for NOx monitoring', Sens. Actuators, B, Vol. 84, pp.1-5.
12. Lee, D.S., Han, S.D., Huh, J.S. and Lee, D.D. (1999) 'Nitrogen oxides sensing characteristics of O3-based nanocrystalline thick film gas sensor', Sens. Actuators, B, Vol. 60, pp.57-63.
13. Ionescu, R., Hoel, A., Granqvist, C.G., Llobet, E. and Heszler, P. (2005) 'Ethanol and H2S gas detection in air and in reducing and oxidising ambience: application of pattern recognition to analyse the out p from temperature-modulated nanoparticulate WO3 gas sensors', Sens. Actuators, B, Vol. 104, pp.124-131.
14. de Lacy Costello, B.P.J., Ewen, R., Gunson, H., Ratcliffe, N. and Spencer, P. (2000) 'The development of sensor system for the early detection of soft rot in stored potato tubers', Meas. Sci. Technol., Vol. 11, pp.1685-1691. (Pubitemid 32076860)
15. Babaei, F.H. and Orvatinia, M. (2003) 'Analysis of thickness dependence of the sensitivity in thin film resistive gas sensors', Sens. and Actuators, B, Vol. 89, pp.256-261.
16. Sberveglieri, G. (1995) 'Recent developments in semiconducting thin-film gas sensors', Sens. Actuators, B, Vol. 23, pp.103-109.
17. Shaver, P.J. (1967) 'Activated tungsten oxide gas detectors', Appl. Phys. Lett., Vol. 11, pp.7-255.
18. Patil, S.B., Patil, P.P. and More, M.A. (2007) 'Acetone vapour sensing characteristics of cobalt-doped SnO2 thin films', Sens. Actuators, B, Vol. 125, pp.126-130. (Pubitemid 47017668)
19. Lee, H-J., Song, J-H., Yoon, Y-S., Kim, T-S., Kim, K-J. and Choi, W-K. (2001) 'Enhancement of CO sensitivity of indium oxide-based semiconductor gas sensor through ultra-thin cobalt adsorption', Sens. Actuators, B, Vol. 79, pp.200-205. (Pubitemid 32866890)
20. 2 for gas sensing', Sens. Actuators, B, Vol. 109, pp.7-12.
21. Belkacem, W., Labidi, A., Guerin, J., Mliki, N. and Aguir, K. (2008) 'Cobalt nanograins effect on the ozone detection by WO3 sensors', Sens. Actuators, B, Vol. 132, pp.196-201.
22. Guerin, J., Bendahan, M. and Aguir, K. (2008) 'A dynamic response model for the WO3-based ozone sensors', Sens. Actuators, B, Vol. 128, pp.462-467.
23. Konova, P., Stoyanova, M., Naydenov, A., Christoskova, St. and Mehandjiev, D. (2006) 'Catalytic oxidation of VOCs and CO by ozone over alumina supported cobalt oxide', Appl. Catal., A, Vol. 298, pp.109-114.