Enhancement of CO sensitivity of indium oxide-based semiconductor gas sensor through ultra-thin cobalt adsorption

Sensors and Actuators, B: Chemical

Volumn 79, Issue 2-3, 2001, Pages 200-205

  Lee, Hye Jung ^a,b   Song, Jae Hoon ^a   Yoon, Young Soo ^a   Kim, Tae Song ^a   Kim, Kwang Joo ^b   Choi, Won Kook ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Konkuk University   (South Korea)

Author keywords

CO sensor; In2O3 thin film; p n junction; Surface activator; Ultra thin Co layer

Indexed keywords

ADSORPTION; ANNEALING; CARBON MONOXIDE; GAS DETECTORS; SEMICONDUCTING INDIUM COMPOUNDS; SENSITIVITY ANALYSIS; SPUTTERING; SURFACE ACTIVE AGENTS; ULTRATHIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

THIN FILM SENSORS;

CHEMICAL SENSORS;

EID: 0035888351     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00876-0     Document Type: Article

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