Theoretical approach to evaluating beryllium oxide as a gate dielectric considering electromagnetics and thermal stability

Applied Physics Letters

Volumn 100, Issue 5, 2012, Pages

  Yum, J H ^a,b   Bersuker, G ^b   Oh, J ^b   Banerjee, S K ^a  

^a The University of Texas at Austin   (United States)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITED; BARRIER LAYERS; CHANNEL CARRIERS; ELECTRICAL ANALYSIS; ELECTROMAGNETIC INTERACTIONS; ELECTROMAGNETICS; INTERFACIAL LAYER; STRUCTURAL STABILITIES; THEORETICAL APPROACH; THEORETICAL MODELS;

ELECTROMAGNETISM; HAFNIUM OXIDES; SILICON; SILICON COMPOUNDS; STABILITY; VANADIUM;

GATE DIELECTRICS;

EID: 84856996386     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3679720     Document Type: Article

References (12)

1. R. Katamreddy, R. Inman, G. Jursich, A. Soulet, and C. Takoudis, Appl. Phys. Lett. 89, 262906 (2006). 10.1063/1.2425023
2. K. J. Hubbard and D. G. Schlom, J. Mater. Res. 11, 2757 (1996). 10.1557/JMR.1996.0350
3. J. H. Yum, T. Akyol, M. Lei, T. Hudnall, G. Bersuker, M. Downer, C. W. Bielawski, J. C. Lee, and S. K. Banerjee, J. Appl. Phys. 109, 064101 (2011). 10.1063/1.3553872
4. J. H. Yum, T. Akyol, M. Lei, D. A. Ferrer, T. Hudnall, G. Bersuker, M. Downer, C. W. Bielawski, J. C. Lee, and S. K. Banerjee, Appl. Phys. Lett. 99, 033502 (2011). 10.1063/1.3614446
5. J. H. Yum, T. Akyol, M. Lei, D. A. Ferrer, T. Hudnall, G. Bersuker, M. Downer, C. W. Bielawski, J. C. Lee, and S. K. Banerjee, J. Vac. Sci. Technol. A 29, 061501 (2011). 10.1116/1.3628546
6. R. E. Hummel, Electronic Properties of Materials, 3rd ed. (Springer, New York, NY, 2005), Chap., pp. 312-337.
7. T. M. Rynne and H. N. Spector, J. Appl. Phys. 52, 393 (1981). 10.1063/1.328507
8. C. E. Housecroft and A. G. Sharpe, Inorganic Chemistry, 3rd ed. (Pearson Prentice Hall, England, 2008), Chap., pp. 115-147.
9. J. Singleton, Band Theory and Electronic Properties of Solids (Oxford University Press, New York, 2001), pp. 32-64.
10. D. R. Gaskell, Introduction to the Thermodynamics of materials, 5th ed. (Taylor Francis Group., New York, NY, 2008), Chap, pp. 69-83.
11. J. H. Yum, T. Akyol, M. Lei, D. A. Ferrer, T. Hudnall, G. Bersuker, M. Downer, C. W. Bielawski, J. C. Lee, and S. K. Banerjee, J. Cryst. Growth 334, 126 (2011). 10.1016/j.jcrysgro.2011.08.040
12. P. G. Klemens, Int. J. Thermophys. 10 (6), 1213 (1989). 10.1007/BF00500572