Fluorocarbon coatings deposited on micron-sized particles by atmospheric PECVD

Plasma Processes and Polymers

Volumn 9, Issue 2, 2012, Pages 217-224

  Abadjieva, Elena ^a   Van Der Heijden, Antoine E D M ^a,b   Creyghton, Yves L M ^a   Van Ommen, J Ruud ^c  

^a TNO   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

atmospheric pressure; fluidzed bed; fluorocarbon coating; particles; plasma enhanced chemical vapor deposition (PE CVD)

Indexed keywords

CHEMICAL NATURE; CIRCULATING FLUIDIZED BED; DIELECTRIC BARRIER DISCHARGE REACTORS; DIFFERENT PRECURSORS; F/C RATIO; FILAMENTARY DISCHARGES; FLUIDZED BED; FLUORINATED SURFACE; FLUOROCARBON COATING; FLUOROCARBON COATINGS; HEXAFLUOROPROPYLENE; MICRON-SIZED PARTICLES; MORPHOLOGICAL FEATURES; PARTICLE SURFACE; PLASMA POWER; SILICA PARTICLES; SURFACE FLUORINATION; TRIFLUORETHANOL; VARIABLE THICKNESS; X-RAY MICROANALYSIS;

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; CROSSLINKING; ELEMENTARY PARTICLES; FLUIDIZATION; FLUIDIZED BEDS; FLUORINE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYTETRAFLUOROETHYLENES; SCANNING ELECTRON MICROSCOPY; SILICA; X RAY PHOTOELECTRON SPECTROSCOPY;

COATINGS;

EID: 84856908435     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.201100044     Document Type: Article

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