Dual-mode piezo-on-silicon resonant temperature and humidity sensor for portable air quality monitoring systems

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 2131-2135

  Fu, Jenna L ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR QUALITY MONITORING; BAW RESONATOR; BULK ACOUSTIC WAVE RESONATOR; DUAL MODES; FUNCTIONALIZED; HIGHER ORDER; HUMIDITY SENSITIVITY; IN-PLANE RESONANCE; MICROMACHINED; POLYETHYLENEIMINE; REFERENCE SENSORS; RH SENSORS; ROOM TEMPERATURE; SENSING PLATFORMS; TEMPERATURE AND HUMIDITY SENSOR; TEMPERATURE AND RELATIVE HUMIDITY; ZNO;

ACOUSTIC RESONATORS; ACOUSTICS; AIR QUALITY; DRIERS (MATERIALS); HUMIDITY SENSORS; RESONATORS; ZINC OXIDE;

ATMOSPHERIC HUMIDITY;

EID: 79951932202     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690510     Document Type: Conference Paper

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