Effects of substrate temperatures on the thermal stability of Al-doped ZnO thin films grown by DC magnetron sputtering

Journal of Materials Science: Materials in Electronics

Volumn 23, Issue 2, 2012, Pages 356-360

  Huang, Jinhua ^a   Tan, Ruiqin ^b   Zhang, Yulong ^a   Li, Jia ^a   Yang, Ye ^a   Zhang, Xianpeng ^a   Song, Weijie ^a  

^a NINGBO INSTITUTE OF MATERIALS TECHNOLOGY AND ENGINEERING   (China)

^b NINGBO UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AL-DOPED ZNO; AZO THIN FILMS; CERAMIC TARGET; DC MAGNETRON SPUTTERING; DIFFERENT SUBSTRATES; HALL MEASUREMENTS; LOW SUBSTRATE TEMPERATURE; SUBSTRATE TEMPERATURE; UV-VIS-NIR; VISIBLE TRANSMITTANCE; ZNO;

ALUMINUM; CHEMISORPTION; ELECTRIC PROPERTIES; SCANNING ELECTRON MICROSCOPY; THERMODYNAMIC STABILITY; X RAY DIFFRACTION; ZINC OXIDE;

THIN FILMS;

EID: 84856736747     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-011-0394-x     Document Type: Article

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