Harmonic reduction in capacitive micromachined ultrasonic transducers by gap feedback linearization

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 59, Issue 1, 2012, Pages 50-59

  Satir, Sarp ^a   Degertekin, F Levent ^a,b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-CENTER; AC EXCITATION; APPLIED VOLTAGES; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; ELECTRICAL INPUTS; FEEDBACK CONFIGURATION; FEEDBACK TOPOLOGY; FUNDAMENTAL FREQUENCIES; HARMONIC IMAGING; HARMONIC REDUCTION; HIGH INTENSITY ULTRASONIC; INPUT SHAPING METHOD; INPUT VOLTAGES; NON-LINEAR RELATIONSHIPS; NON-LINEARITY; RESISTANCE FEEDBACK; SERIES RESISTOR; SUBHARMONICS; TIME-DOMAIN MODEL;

COMPUTER CONTROL SYSTEMS; ELECTROSTATIC DEVICES; ELECTROSTATIC FORCE; FEEDBACK LINEARIZATION; HARMONIC ANALYSIS; HARMONIC DISTORTION; HARMONIC GENERATION; TIME DOMAIN ANALYSIS;

ULTRASONIC TRANSDUCERS;

ARTICLE; COMPUTER SIMULATION; EQUIPMENT DESIGN; FEEDBACK SYSTEM; INSTRUMENTATION; NONLINEAR SYSTEM; SIGNAL PROCESSING; TRANSDUCER; ULTRASOUND;

COMPUTER SIMULATION; EQUIPMENT DESIGN; FEEDBACK; NONLINEAR DYNAMICS; SIGNAL PROCESSING, COMPUTER-ASSISTED; TRANSDUCERS; ULTRASONICS;

EID: 84856643529     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2012.2155     Document Type: Article

References (15)

1. C. C. Shen, Y. C. Wang, and Y. C. Hsieh, "Third harmonic transmit phasing for tissue harmonic generation," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 54, no. 7, pp. 1370-1381, 2007.
2. D. H. Simpson, C. T. Chin, and P. N. Burns, "Pulse inversion Doppler: A new method for detecting nonlinear echoes from microbubble contrast agents," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 46, no. 2, pp. 372-382, 1999.
3. T. L. Szabo, Diagnostic Ultrasound Imaging - Inside Out. Amsterdam, The Netherlands: Elsevier Academic, 2004, ch. 12.
4. I. Ladabaum, X. Jin, H. T. Soh, A. Atalar, and B. T. Khuri-Yakub, "Surface micromachined capacitive ultrasonic transducers," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 45, no. 3, pp. 678- 690, 1998. (Pubitemid 128748727)
5. A. Novell, M. Legros, N. Felix, and A. Bouakaz, "Exploitation of capacitive micromachined transducers for nonlinear ultrasound imaging," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 56, no. 12, pp. 2733-2743, 2009.
6. S. Zhou, P. Reynolds, and J. Hossack, "Precompensated excitation waveforms to suppress harmonic generation in MEMS electrostatic transducers," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 51, no. 11, pp. 1564-1574, 2004.
7. J. D. Fraser, "Bias charge regulator for capacitive micromachined ultrasonic transducers," U.S. Patent 6 328 696, Dec. 11, 2001.
8. A. Lohfink and P. C. Eccardt, "Linear and nonlinear equivalent circuit modeling of CMUTs," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 52, no. 12, pp. 2163-2172, 2005.
9. L. E. Kinsler, A. R. Frey, A. B. Coppens, and J. V. Sanders, Fundamentals of Acoustics. New York, NY: Wiley, 1999.
10. S. D. Senturia, Microsystem Design. New York, NY: Springer, 2001, ch. 6.
11. P. B. Chu and S. Pister, "Analysis of closed-loop control of parallelplate electrostatic microgrippers," in Proc. IEEE Int. Conf. Robotics and Automation, 1994, pp. 820-825.
12. J. I. Seeger and S. B. Crary, "Stabilization of electrostatically actuated mechanical devices," in IEEE Int. Conf. Solid-State Sensors and Actuators, pp. 1133-1136, 1997.
13. J. I. Seeger and B. E. Boser, "Charge control of parallel-plate, electrostatic actuators and the tip-in instability," J. Microelectromech. Syst., vol. 12, no. 5, pp. 656-671, 2003.
14. J. M. Kyynäränen, A. S. Oja, and H. Seppa, "Increasing the dynamic range of a micromechanical moving-plate capacitor," Analog Integr. Circuits Signal Process., vol. 29, no. 1-2, pp. 61-70, 2001. (Pubitemid 32902615)
15. R. O. Guldiken, J. McLean, and F. L. Degertekin, "CMUTs with dual-electrode structure for improved transmit and receive performance," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 53, no. 2, pp. 483-491, 2006.