Photonic crystal silicon optical modulators: Carrier-injection and depletion at 10 Gb/s

IEEE Journal of Quantum Electronics

Volumn 48, Issue 2, 2012, Pages 210-220

  Nguyen, Hong C ^a   Sakai, Yuya ^a   Shinkawa, Mizuki ^a   Ishikura, Norihiro ^a   Baba, Toshihiko ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

Optical modulators; photonic crystal waveguides; silicon photonics

Indexed keywords

10 GB/ S; CARRIER INJECTION; DEPLETION MODES; DRIVE VOLTAGE; GROUP INDEX; MACH-ZEHNDER TYPE MODULATOR; MODULATION EFFICIENCY; PHOTONIC CRYSTAL WAVEGUIDE; PHOTONIC CRYSTAL WAVEGUIDES; PRE-EMPHASIS; SIGNAL QUALITY; SILICON PHOTONICS;

LASER OPTICS; MODULATION; OPTICAL WAVEGUIDES; PHOTONIC CRYSTALS; SLOW LIGHT; WAVEGUIDES;

LIGHT MODULATORS;

EID: 84856300470     PISSN: 00189197     EISSN: None     Source Type: Journal    
DOI: 10.1109/JQE.2011.2174338     Document Type: Article

References (26)

1. G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, "Silicon optical modulators," Nature Photon., vol. 4, pp. 518-526, Aug. 2010.
2. A. S. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, "High-speed optical modulation based on carrier depletion in a silicon waveguide," Opt. Exp., vol. 15, no. 2, pp. 660-668, Jan. 2007. (Pubitemid 46168516)
3. G. Rasigade, M. Ziebell, D. Marris-Morini, J. M. Fedeli, F. Milesi, P. Grosse, D. Bouville, E. Cassan, and L. Vivien, "High extinction ratio 10 Gbit/s silicon optical modulator," Opt. Exp., vol. 19, no. 7, pp. 5827-5832, Mar. 2011.
4. T. Y. Liow, K. W. Ang, Q. Fang, J. F. Song, Y. Z. Xiong, M. B. Yu, G. Q. Lo, and D. L. Kwong, "Silicon modulators and germanium photode-tectors on SOI: Monolithic integration, compatibility, and performance optimization," IEEE J. Sel. Topics Quantum Electron., vol. 16, no. 1, pp. 307-315, Jan.-Feb. 2010.
5. G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, "Performance evolutions of carrier depletion silicon optical modulators: From p-n to p-i-p-i-n diodes," IEEE J. Sel. Topics Quantum Electron., vol. 16, no. 1, pp. 179-184, Jan.-Feb. 2010.
6. S. J. Spector, C. M. Sorace, M. W. Geis, M. E. Grein, J. U. Yoon, T. M. Lyszczarz, E. P. Ippen, and F. X. Kartner, "Operation and optimization of silicon-diode-based optical modulators," IEEE J. Sel. Topics Quantum Electron., vol. 16, no. 1, pp. 165-172, Jan.-Feb. 2010.
7. T. Tanabe, K. Nishiguchi, E. Kuramochi, and M. Notomi, "Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity," Opt. Exp., vol. 17, no. 25, pp. 22505-22513, Dec. 2009.
8. X. N. Chen, Y. S. Chen, Y. Zhao, W. Jiang, and R. T. Chen, "Capacitor-embedded 0.54 pJ/bit silicon-slot photonic crystal waveguide modulator," Opt. Lett., vol. 34, no. 5, pp. 602-604, Mar. 2009.
9. X. L. Wang, C. Y. Lin, S. Chakravarty, J. D. Luo, A. K. Y. Jen, and R. T. Chen, "Effective in-device r(33) of 735 pm/V on electro-optic polymer infiltrated silicon photonic crystal slot waveguides," Opt. Lett., vol. 36, no. 6, pp. 882-884, Mar. 2011.
10. G. Shambat, B. Ellis, M. A. Mayer, A. Majumdar, E. E. Haller, and J. Vuèkoviæ, "Ultralow power fiber-coupled gallium arsenide photonic crystal cavity electro-optic modulator," Opt. Exp., vol. 19, no. 8, pp. 7530-7536, 2011.
11. C. Y. Lin, X. L. Wang, S. Chakravarty, B. S. Lee, W. C. Lai, J. D. Luo, A. K. Y. Jen, and R. T. Chen, "Electro-optic polymer infiltrated silicon photonic crystal slot waveguide modulator with 23 dB slow light enhancement," Appl. Phys. Lett., vol. 97, no. 9, pp. 093304-1-093304-3, Aug. 2010.
12. H. C. Nguyen, Y. Sakai, M. Shinkawa, N. Ishikura, and T. Baba, "10 Gb/s operation of photonic crystal silicon optical modulators," Opt. Exp., vol. 19, no. 14, pp. 13000-13007, Jul. 2011.
13. W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, "Ultracompact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator," Opt. Exp., vol. 15, no. 25, pp. 17106-17113, Dec. 2007. (Pubitemid 350260570)
14. Q. F. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, "12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators," Opt. Exp., vol. 15, no. 2, pp. 430-436, Jan. 2007. (Pubitemid 46168487)
15. T. P. White, L. O'Faolain, J. T. Li, L. C. Andreani, and T. F. Krauss, "Silica-embedded silicon photonic crystal waveguides," Opt. Exp., vol. 16, no. 21, pp. 17076-17081, Oct. 2008.
16. R. A. Soref and B. R. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron., vol. 23, no. 1, pp. 123-129, Jan. 1987.
17. A. Berrier, M. Mulot, G. Malm, M. Östling, and S. Anand, "Carrier transport through a dry-etched InP-based 2-D photonic crystal," J. Appl. Phys., vol. 101, no. 12, pp. 123101-1-123101-6, Jun. 2007.
18. D. Mori, S. Kubo, H. Sasaki, and T. Baba, "Experimental demonstration of wideband dispersion-compensated slow light by a chirped photonic crystal directional coupler," Opt. Exp., vol. 15, no. 9, pp. 5264-5270, Apr. 2007. (Pubitemid 46699016)
19. M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, "Low-voltage, compact, depletion-mode, silicon Mach-Zehnder modulator," IEEE J. Sel. Topics Quantum Electron., vol. 16, no. 1, pp. 159-164, Jan.-Feb. 2010.
20. D. M. Gill, S. S. Patel, M. Rasras, K. Y. Tu, A. E. White, Y. K. Chen, A. Pomerene, D. Carothers, R. L. Kamocsai, C. M. Hill, and J. Beattie, "CMOS-compatible Si-ring-assisted Mach-Zehnder interferometer with internal bandwidth equalization," IEEE J. Sel. Topics Quantum Electron., vol. 16, no. 1, pp. 45-52, Jan.-Feb. 2010.
21. E. Ip, A. P. T. Lau, D. J. F. Barros, and J. M. Kahn, "Coherent detection in optical fiber systems," Opt. Exp., vol. 16, no. 2, pp. 753-791, Jan. 2008. (Pubitemid 351162215)
22. S. Akiyama, T. Kurahashi, T. Baba, N. Hatori, T. Usuki, and T. Yamamoto, "A 1 V peak-to-peak driven 10-Gb/s slow-light silicon Mach-Zehnder modulator using cascaded ring resonators," Appl. Phys. Exp., vol. 3, no. 7, pp. 072202-1-072202-3, 2010.
23. L. Liao, D. Samara-Rubio, M. Morse, A. S. Liu, D. Hodge, D. Rubin, U. D. Keil, and T. Franck, "High speed silicon Mach-Zehnder modulator," Opt. Exp., vol. 13, no. 8, pp. 3129-3135, Apr. 2005. (Pubitemid 40899177)
24. F. Y. Gardes, D. J. Thomson, N. G. Emerson, and G. T. Reed, "40 Gb/s silicon photonics modulator for TE and TM polarizations," Opt. Exp., vol. 19, no. 12, pp. 11804-11814, Jun. 2011.
25. H. W. Chen, Y. H. Kuo, and J. E. Bowers, "25 Gb/s hybrid silicon switch using a capacitively loaded traveling wave electrode," Opt. Exp., vol. 18, no. 2, pp. 1070-1075, Jan. 2010.
26. T. Baba, J. Adachi, N. Ishikura, Y. Hamachi, H. Sasaki, T. Kawasaki, and D. Mori, "Dispersion-controlled slow light in photonic crystal waveguides," Proc. Jpn. Acad. Ser. B: Phys. Biol. Sci., vol. 85, pp. 443-453, Dec. 2009.