A polymer-based bidirectional micropump driven by a PZT bimorph

Microsystem Technologies

Volumn 17, Issue 3, 2011, Pages 403-409

  Luo, Yi ^a   Lu, Miao ^a   Cui, Tianhong ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BACK PRESSURES; BACKWARD FLOW; BI-DIRECTIONAL FLOWS; CANTILEVER VALVES; DRIVING FREQUENCIES; FLUID MOVEMENT; FREQUENCY SWEEPING; LIFTOFF TECHNIQUE; LIQUID CONTROL; MAXIMUM FLOW RATE; MICRO PUMP; PASSIVE VALVES; POLYMER MEMBRANE; PZT; VALVE SEATS;

DRUG DELIVERY; FUNCTIONAL POLYMERS; PUMPS; VALVES (MECHANICAL);

FLOW RATE;

EID: 84856249523     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1199-1     Document Type: Article

References (17)

1. Bohm S, Olthuis W, Bergveld P (1999) A plastic micropump constructed with conventional techniques and materials. Sens Actuat A 77:223-228 (Pubitemid 30524266)
2. Chen L, Lee S, Choo J, Lee EK (2008) Continuous dynamic flow micropump for microfluid manipulation. J Micromech Microeng 18:013001 (22 pp)
3. Cooney CG, Towe BC (2004) A thermopneumatic dispensing micropump. Sens Actuat A 116:519-524
4. Doll AF, Wischke M, Geipel A, Goldschmidtboeing F, Ruthmann O, Hopt UT, Schrag HJ, Woias P (2007) A novel artificial sphincter prosthesis driven by a four-membrane silicon micropump. Sens Actuat A 139:203-209 (Pubitemid 47321872)
5. Gietzelt T, Piotter V, Reprecht R, Hausselt J (2002) Manufacturing of isolated ceramic microstructures. Microsyst Technol 9:99-103 (Pubitemid 40536081)
6. Han A, Wang O, Graff M, Mohanty SK, Edwards TL, Han KH, Bruno F (2003) A multi-layer plastic/glass microfluidic systems containing electrical and mechanical functionality. Lab chip 3:150-157 (Pubitemid 41646547)
7. Hwang IH, An JY, Ko KH, Shin SM, Lee JH (2007) A novel micropump with fixed-geometry valves and low leakage flow. J Micromech Microeng 17:1632-1639
8. Kamper KP, Dopper J, Ehrfeld W, Oberbeck S (1998) A self-filling low-cost membrane micropump, In: Proc. IEEE MEMS'98, Heidelberg, Germany (25-29 January, 1998), pp 432-437
9. Koch M, Harris N, Maas R, Evans AGR, White WM, Brunnschweiler A (1997) A novel micropump design with thick-film piezoelectric actuation. Meas Sci Technol 8:49-57 (Pubitemid 127557995)
10. Lee S, Kim KJ (2006) Design of IPMC actuator-driven valve-less micropump and its flow rate estimation at low reynolds numbers. Smart Mater Struct 15:1103-1109 (Pubitemid 44102068)
11. Lee CY, Chang HT, Wen CY (2008) A MEMS-based valveless impedance pump utilizing electromagnetic actuation. J Micromech Microeng 18:035044 (9 pp)
12. Nisar A, Afzulpurkar N, Mahaisavariya B, Tuantranont A (2008) MEMS-based micropumps in drug delivery and biomedical applications. Sens Actuat B 130:917-942 (Pubitemid 351444729)
13. Shen M, Yamahata C, Gijs MAM (2008) Miniaturized PMMA ballvalve micropump with cylindrical electromagnetic actuator. Microelectron Eng 85:1104-1107
14. Truong TQ, Nguyen NT (2004) A polymeric piezoelectric micropump based on lamination technology. J Micromech Microeng 14:632-638
15. Wego A, Pagel L (2001) A self-filling micropump based on PCB technology. Sens Actuat A 88:220-226 (Pubitemid 32874304)
16. Yoon JS, Choi JW, Lee IH, Kim MS (2007) A valveless micropump for bidirectional applications. Sens Actuat A 135:833-838 (Pubitemid 46518081)
17. Zengerle R, Ulrich J, Kluge S, Richter M, Richter A (1995) A bidirectional silicon micropump. Sens Actuat A 50:81-86