Manufacturing of isolated ceramic microstructures

Microsystem Technologies

Volumn 9, Issue 1-2, 2003, Pages 99-103

  Gietzelt, T ^a   Piotter, V ^a   Ruprecht, R ^a   Hausselt, J ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; BINDERS; CERAMIC MATERIALS; INJECTION MOLDING; MATHEMATICAL MODELS; MOLDS; NITRIC ACID; OPTIMIZATION; POLYMETHYL METHACRYLATES; SCANNING ELECTRON MICROSCOPY; SINTERING; ZIRCONIA;

DEMOLDING; DENSITY GRADIENTS; LIGA TECHNOLOGY; POWDER INJECTION MOLDING (PIM);

MICROSTRUCTURE;

EID: 0038113095     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0208-4     Document Type: Article

References (3)

1. Lorenz H Photo-Fabrication of Ultra-Precise Micromolds. See http://www.mimotec.ch/PDF/article.pdf
2. Lorenz H; Despont M; Fahrni N; Brugger J; Vettiger P; Renaud P (1998) High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and it's application for MEMS. Sensors and Actuators A 64: 33-39
3. Gietzelt T; Müller K; Plotter V; Plewa K; Ruprecht R (2000) Herstellung einer Zahnringpumpe und eines verschleißbeständigen Formeinsatzes durch Mikropulverspritzgießen. Statuskolloquium MALVE, 25.10.2000, FZKA-Bericht 6528, Forschungszentrum Karlsruhe