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Optics Communications

Volumn 285, Issue 7, 2012, Pages 1675-1679

Dielectric interface effects in subsurface microscopy of integrated circuits

(3) Hakan Koklu F a Goldberg, Bennett B b Selim Unlu M a

a Boston University (United States)

b Boston University (United States)

Author keywords

Diffraction limit; Numerical aperture; Polarization; Solid immersion; Spatial resolution

Indexed keywords

DEFOCUS; DIELECTRIC INTERFACE; DIFFRACTION LIMITS; HIGH NUMERICAL APERTURES; LINEARLY POLARIZED; LONGITUDINAL DISPLACEMENTS; MAXIMUM RESOLUTION; NUMERICAL APERTURE; OBJECTIVE LENS; SILICON INTEGRATED CIRCUITS; SOLID IMMERSION; SOLID IMMERSION LENS; SPATIAL RESOLUTION; TWO DIRECTIONS;

IMAGE QUALITY; POLARIZATION;

INTEGRATED CIRCUITS;

EID: 84856230660 PISSN: 00304018 EISSN: None Source Type: Journal
DOI: 10.1016/j.optcom.2011.12.050 Document Type: Article

Times cited : (3)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.