Subsurface microscopy of integrated circuits with angular spectrum and polarization control

Optics Letters

Volumn 34, Issue 8, 2009, Pages 1261-1263

  Koklu F H ^a   Ippolito, S B ^b   Goldberg, B B ^a   Unlu M S ^a  

^a Boston University   (United States)

^b IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; SPECTRUM ANALYSIS; TIMING CIRCUITS;

ANGULAR SPECTRA; ANNULAR PUPIL; CONFOCAL IMAGING; INCOMING LIGHT; POLARIZATION CONTROL; POLARIZATION DIRECTION; SPATIAL RESOLUTION; SUBSURFACE MICROSCOPIES;

POLARIZATION;

EID: 66349091658     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.34.001261     Document Type: Article

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