Solid immersion lens applications for nanophotonic devices

Journal of Nanophotonics

Volumn 2, Issue 1, 2008, Pages

  Serrels, Keith A ^a   Ramsay, Euan ^a   Dalgarno, Paul A ^a   Gerardot, Brian D ^a   O'Connor, John A ^a   Hadfield, Robert H ^a   Warburton, Richard J ^a   Reid, Derryck T ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

Integrated circuit inspection; Nanoscale spectroscopy; Optical data storage; Optical super resolution; Photoresponse mapping; Semiconductor; Solid immersion lens

Indexed keywords

ABERRATIONS; ASPHERICS; DIGITAL STORAGE; LASER EXCITATION; LENSES; NANOSTRUCTURES; SEMICONDUCTOR MATERIALS; SEMICONDUCTOR QUANTUM DOTS;

INTEGRATED CIRCUIT INSPECTION; NANO SCALE; PHOTORESPONSES; SOLID IMMERSION LENS; SUPER RESOLUTION;

OPTICAL DATA STORAGE;

EID: 71749083588     PISSN: None     EISSN: 19342608     Source Type: Journal    
DOI: 10.1117/1.3068652     Document Type: Article

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