Fabrication of micro heaters on polycrystalline 3C-SiC suspended membranes for gas sensors and their characteristics

Microelectronic Engineering

Volumn 87, Issue 11, 2010, Pages 2348-2352

  Chung, Gwiy Sang ^a   Jeong, Jae Min ^a  

^a University of Ulsan   (South Korea)

Author keywords

AlN; MEMS; Micro heater; Polycrystalline 3C SiC; Pt

Indexed keywords

ALN; ALN THIN FILMS; ENERGY BANDGAPS; GAS SENSORS; HIGH-TEMPERATURE ENVIRONMENT; MEMBRANE SURFACE; MICRO-HEATERS; OPERATING TEMPERATURE; POLYCRYSTALLINE 3C-SIC; POWER CONSUMPTION; PT THIN FILMS; SURFACE MICROMACHINING TECHNOLOGY; SUSPENDED MEMBRANES; TEMPERATURE DETECTORS; THERMAL COEFFICIENTS; THERMAL DISTRIBUTIONS; THERMOVISION;

FABRICATION; LATTICE MISMATCH; MICROMACHINING; PLATINUM; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; TEMPERATURE SENSORS; THIN FILMS;

TEMPERATURE MEASURING INSTRUMENTS;

EID: 77955683650     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.04.005     Document Type: Article

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