Thermal analysis and design of a micro-hotplate for sisubstrated micro-structural gas sensor

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Volumn , Issue , 2008, Pages 284-287

  Tao, Chunmin ^a   Yin, Chenbo ^a   He, Maoxian ^a   Tu, Shandong ^b  

^a NANJING TECH UNIVERSITY   (China)

^b EAST CHINA UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Finite element anslysis; Micro hotplate; Si substrated

Indexed keywords

ELECTRIC POWER UTILIZATION; GAS DETECTORS; METALLIC COMPOUNDS; METALS; PLATINUM; PLATINUM METALS; SENSORS; SILICON COMPOUNDS; THERMOANALYSIS;

FINITE ELEMENT ANSLYSIS; GAS SENSORS; HEAT AND ELECTRICITY; INTERNATIONAL CONFERENCES; LOW VOLTAGES; LOW-POWER CONSUMPTION; METAL OXIDE GAS SENSORS; MICRO HOT PLATES; MICRO-HOTPLATE; MICRO-STRUCTURAL; MOLECULAR SYSTEMS; POSSIBLE SOLUTIONS; POWER CONSUMPTION; SEMICONDUCTOR METAL OXIDES; SI-SUBSTRATED; THERMAL ANALYSIS; THIN-FILM TECHNOLOGIES;

CHEMICAL SENSORS;

EID: 50249176095     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2008.4484336     Document Type: Conference Paper

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