Endogenous and exogenous hydrogen influence on amorphous silicon thin films analysis by pulsed radiofrequency glow discharge optical emission spectrometry

Analytica Chimica Acta

Volumn 714, Issue , 2012, Pages 1-7

  Sánchez, Pascal ^a,b   Alberts, Deborah ^a   Fernández, Beatriz ^a   Menéndez, Armando ^b   Pereiro, Rosario ^a   Sanz Medel, Alfredo ^a  

^a UNIVERSITY OF OVIEDO   (Spain)

^b Parque Tecnológico de Asturias   (Spain)

Author keywords

Gas mixture argon hydrogen; Hydrogenated amorphous silicon; Optical emission spectrometry; Pulsed radiofrequency glow discharge; Thin film solar cells

Indexed keywords

A-SI:H; AMORPHOUS SILICON THIN FILMS; ARGON DISCHARGES; CONDUCTING MATERIALS; DEPTH RESOLUTION; DUTY CYCLES; EMISSION INTENSITY; ENHANCED EMISSION; HYDROGENATED AMORPHOUS SILICON (A-SI:H); OPTICAL EMISSION SPECTROMETRY; OPTIMISATIONS; OPTIMUM CONDITIONS; P-DOPED LAYERS; PENETRATION RATES; PHOTOVOLTAIC INDUSTRY; PRODUCTION COST; PULSE FREQUENCIES; PULSE PARAMETER; PULSED RADIOFREQUENCY GLOW DISCHARGE; RADIOFREQUENCY GLOW DISCHARGES; SPUTTERING RATE; THIN FILM SOLAR CELLS;

AMORPHOUS FILMS; ARGON; FILM GROWTH; GLOW DISCHARGES; HYDROGEN; HYDROGENATION; LIGHT EMISSION; NANOSTRUCTURED MATERIALS; OPTICAL EMISSION SPECTROSCOPY; PHOSPHORUS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SOLAR POWER GENERATION; SPECTROMETRY; THIN FILMS;

AMORPHOUS SILICON;

HYDROGEN; SILICON;

AMORPHOUS SILICON THIN FILM; ARTICLE; CONDUCTOR; CONTROLLED STUDY; HYDROGENATION; PRIORITY JOURNAL; PROCESS OPTIMIZATION; PULSED RADIOFREQUENCY GLOW DISCHARGE OPTICAL EMISSION SPECTROMETRY; QUALITATIVE ANALYSIS; SEMICONDUCTOR; SPECTROMETRY;

EID: 84855685695     PISSN: 00032670     EISSN: 18734324     Source Type: Journal    
DOI: 10.1016/j.aca.2011.11.052     Document Type: Article

References (26)

1. Green M.A. J. Mater. Sci. Mater. Electron. 2007, 18:S15-S19.
2. Psysch D., Mette A., Glunz S.W. Sol. Energy Mater. Sol. Cells 2007, 91:1698-1706.
3. Pisonero J., Fernandez B., Günther D. J. Anal. At. Spectrom. 2009, 24:1145-1160.
4. Escobar-Galindo R., Gago R., Lousa A., Albella J.M. TrAC Trends Anal. Chem. 2009, 28:494-505.
5. Fernández B., Pereiro R., Sanz-Medel A. Anal. Chim. Acta 2010, 679:7-16.
6. Th. Nelis, R. Payling, Glow Discharge Optical Emission Spectroscopy: A Practical Guide, RSC Analytical Spectroscopy Monographs, Cambridge, UK, 2003.
7. Le Coustumer P., Montelica-Heino M., Chapon P., François H., Payling R. Surf. Interface Anal. 2003, 35:623-629.
8. Alberts D., Fernández B., Pereiro R., Sanz-Medel A. J. Anal. At. Spectrom. 2011, 26:776-783.
9. Belenguer Ph., Ganciu M., Guillot Ph., Nelis Th. Spectrochim. Acta Part B 2009, 64:623-641.
10. Nelis Th., Aeberhard M., Hohl M., Rohr L., Michler J. J. Anal. At. Spectrom. 2006, 21:112-125.
11. Yan X., Lin Y., Huang R., Hang W., Harrison W.W. J. Anal. At. Spectrom. 2010, 25:534-543.
12. Alberts D., Horvath P., Nelis Th., Pereiro R., Bordel N., Michler J., Sanz-Medel A. Spectrochim. Acta Part B 2010, 65:533-541.
13. Lewis C.L., Li L., Millay J.T., Downey S., Warrick J., King F.L. J. Anal. At. Spectrom. 2003, 18:527-532.
14. Tsukiji M., Wagatsuma K. Microchem. J. 2007, 87:175-179.
15. Wagatsuma K., Hyunkook P. Metall. Anal. 2007, 27:1-7.
16. Wagastuma K., Honda H. Spectrochim. Acta Part B 2005, 60:1538-1544.
17. Fernández B., Bordel N., Pereiro R., Sanz-Medel A. J. Anal. At. Spectrom. 2003, 18:151-156.
18. Mushtaq S., Pickering J.C., Steers E.B.M., Horvath P., Whitby J.A., Michler J. J. Anal. At. Spectrom. 2011, 10.1039/c1ja10087d.
19. Hodoroaba V.-D., Hoffmann V., Steers E.B.M., Wetzig K. J. Anal. At. Spectrom. 2000, 15:1075-1080.
20. Martín A., Menéndez A., Pereiro R., Bordel N., Sanz-Medel A. Anal. Bioanal. Chem. 2007, 388:1573-1582.
21. Bengtson A., Hänström S. Proceeding of Fifth International Conference on Progress in Analytical Chemistry in the Steel and Metals Industries 1999, 47-54. R. Tomellini (Ed.).
22. Fernández B., Bordel N., Pérez C., Pereiro R., Sanz-Medel A. J. Anal. At. Spectrom. 2002, 17:1549-1555.
23. Sánchez P., Fernández B., Menéndez A., Orejas J., Pereiro R., Sanz-Medel A. Anal. Chim. Acta 2011, 684:47-53.
24. Green M.A. Thin-film photovoltaics. Advances in Solar Energy: An Annual Review of Research and Development 2003, 187-214. American Solar Energy Society, Inc., New York, USA. D.Y. Goswami (Ed.).
25. Weyler S., Bengtson A. J. Anal. At. Spectrom. 2010, 25:849-855.
26. Menéndez A., Pereiro R., Bordel N., Sanz-Medel A. Spectrochim. Acta Part B 2005, 60:824-833.