Emission characteristics of Grimm-style glow discharge plasmas with helium matrix plasma gas containing small amounts of nitrogen

Microchemical Journal

Volumn 87, Issue 2, 2007, Pages 175-179

  Tsukiji, Machiko ^a   Wagatsuma, Kazuaki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Copper; Glow discharge optical emission spectrometry; He N2 mixed gas; Penning ionization; Silver; Sputtering rate

Indexed keywords

EID: 36049034705     PISSN: 0026265X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microc.2007.08.003     Document Type: Article

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