Local thickness measurement through scattering contrast and electron energy-loss spectroscopy

Micron

Volumn 43, Issue 1, 2012, Pages 8-15

  Zhang, Huai Ruo ^a   Egerton, Ray F ^a,b   Malac, Marek ^a,b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Electron energy loss spectroscopy (EELS); Inelastic mean free path (IMFP); Mass thickness contrast; Scattering cross section; Thickness measurement in TEM

Indexed keywords

INELASTIC MEAN FREE PATH; KRAMERS-KRONIG; LOG-RATIO METHOD; MASS-THICKNESS CONTRAST; MEASUREMENT SENSITIVITY; NANOCUBES; POLYCRYSTALLINE; SCATTERING CONTRAST; SCATTERING CROSS SECTION; SURFACE SCATTERING; TRANSMITTED INTENSITIES;

ACOUSTICS; AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; DISSOCIATION; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; GOLD; MEASUREMENTS; THICKNESS GAGES; THICKNESS MEASUREMENT;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 84855484715     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2011.07.003     Document Type: Article

References (30)

1. Burge R.E., Smith G.H. A new calculation of electron scattering cross sections and a theoretical discussion of image-contrast in the electron microscope. Proc. Phys. Soc. 1962, 79:673-690.
2. Coupland J.H. Variation of contrast in electron microscope images with size of objective aperture. Proc. Phys. Soc. B 1956, 69:642-646.
3. Egerton R.F., Cheng S.C. Measurement of local thickness by electron energy-loss spectroscopy. Ultramicroscopy 1987, 21:231-244.
4. Egerton R.F. Electron Energy-Loss Spectroscopy in the Electron Microscope 1996, Plenum Press, New York. 2nd ed.
5. Hall C.E., Inoue T. Experimental study of electron scattering in electron microscope specimens. J. Appl. Phys. 1957, 28:1346-1348.
6. Hirsch P.B., Howie A., Nigholson R.B., Pashley D.W., Whelan M.J. Electron Microscopy of Thin Crystals 1965, Butterworths, London.
7. Iakoubovskii K., Mitsuishi K., Nakayama Y., Furuya K. Thickness measurements with electron energy loss spectroscopy. Microsc. Res. Technol. 2008, 71:626-631.
8. Iakoubovskii K., Mitsuishi K., Nakayama Y., Furuya K. Mean free path of inelastic electron scattering in elemental solids and oxides using transmission electron microscopy: atomic number dependent oscillatory behaviour. Phys. Rev. B 2008, 77. 104102 (1-7).
9. Ingle J.D.J., Crouch S.R. Spectrochemical Analysis 1988, Prentice Hall, New Jersey.
10. Jiang N., Su D., Spence J.C.H. On the measurement of thickness in nanoporous materials by EELS. Ultramicroscopy 2010, 111:62-65.
11. Johansen B.V., Nanork E., Krekling T. Hollow cone illumination - I. Dark-field electron microscopy of biologic specimens. Micron 1981, 12:13-23.
12. Joy D.C., Maher D.M. Determination of crystal thickness from relative transmission measurements. Proceedings of the 33rd Annual Meeting of Electron Microscopy Society of American 1975, 242-243.
13. Krakow W., Howland L.A. A method for producing hollow cone illumination electronically in the conventional transmission microscope. Ultramicroscopy 1976, 2:53-67.
14. Leder L.B., Suddeth J.A. Characteristic energy loss of electrons in carbon. J. Appl. Phys. 1960, 31:1422-1426.
15. Lenz F. Zur streuung mittelschneller elektronen in kleinste Winkel. Z. Naturforsch. A 1954, 9:185-204.
16. Malis T., Cheng S.C., Egerton R.F. EELS log-ratio technique for specimen-thickness measurement in the TEM. J. Electron Microsc. Technol. 1988, 8:193-200.
17. Pozsgai I. Thickness determination by measuring electron transmission in the TEM at 200kV. Ultramicroscopy 1997, 68:69-75.
18. Pozsgai I., Tóth L. Linear thickness dependence of electron contrast in single crystal gold films in the TEM. Proceedings of the 12th European Congress in Electron Microscopy, vol. IV 2000, S75-S76.
19. Pozsgai I. Mass thickness determination and microanalysis of thin films in the TEM-revisited. Ultramicroscopy 2007, 107:191-195.
20. Reimer L., Sommer K.H. Messungen und Berechnungen zum electronenmikroskopischen Streukontrast für 17-1200keV electronen. Z. Naturforsch. A 1968, 1569-1582.
21. Reimer L., Kohl H. Transmission Electron Microscopy 2008, Springer-Verlag, Berlin. 5th ed.
22. Ristau R.A., Hoffer F., Barmak K., Coffey K.R., Howard J.K. An EFTEM and conical dark field investigation of co-sputtered CoPt+Yttria stabilized zirconia. Micron 1998, 29:33-41.
23. Schattschneider P., Hebert C., Jouffrey B. Orientation dependence of ionization edges in EELS. Ultramicroscopy 2001, 86:343-353.
24. Schmitz G., Ewert J.C., Hartung F. Chemical analysis by high-angle hollow cone illumination. Ultramicroscopy 1999, 77:49-63.
25. Smith G.H., Burge R.E. A theoretical investigation of plural and multiple scattering of electrons by amorphous films, with special reference to image-contrast in the electron microscope. Proc. Phys. Soc. 1963, 81:612-632.
26. Wang F., Egerton R., Malac M. Fourier-ratio deconvolution techniques for electron energy-loss spectroscopy (EELS). Ultramicroscopy 2009, 109:1245-1249.
27. Wang F., Zhang H.B., Cao M., Nishi R., Takaoka A. Determination of the linear attenuation range of electron transmission through film specimens. Micron 2010, 41:769-774.
28. Yang Y.Y., Egerton R.F. Tests of two alternative methods for measuring specimen thickness in a transmission electron microscope. Micron 1995, 26:1-5.
29. Zeitler E., Bahr G.F. Contributions to quantitative electron microscopy. J. Appl. Phys. 1959, 30:940-944.
30. Zhang H., Egerton R.F., Malac M. Local thickness measurement in TEM. Microsc. Microanal. 2010, 16(Suppl. 2):344-345.