Thickness determination by measuring electron transmission in the TEM at 200 kV

Ultramicroscopy

Volumn 68, Issue 1, 1997, Pages 69-75

  Pozsgai, I ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS; TRANSMISSION ELECTRON MICROSCOPY;

MULTICOMPONENT FILMS;

THICKNESS MEASUREMENT;

ACCURACY; ARTICLE; CRYSTAL STRUCTURE; MORPHOMETRICS; TRANSMISSION ELECTRON MICROSCOPY; X RAY SPECTROMETRY;

EID: 0342276043     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(97)00024-7     Document Type: Article

References (9)

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3. G. Moliere, Z. Naturforsch. (1947) 2a 133.
4. B. von Borries, Z. Naturforsch. (1949) 51.
5. E. Ruska, Z. Naturforsch. (1938) 402.
6. L. Reimer, Z. Angew. Phys. (1957) 34.
7. I. Pozsgai, A. Barna, in: Scanning Electron Microscopy, SEM, vol. 2. A.M.F. O'Hare (Ed.), Chicago, IL 60666, USA, 1983 p. 585.
8. R.F. Egerton, Electron Energy-loss Spectroscopy in the Electron Microscope, Plenum Press, New York, 1986, p. 132.
9. L. Reimer, Transmission Electron Microscopy, Springer Series in Optical Sciences, No. 36. Springer, New York, 1984.