Thickness measurements with electron energy loss spectroscopy

Microscopy Research and Technique

Volumn 71, Issue 8, 2008, Pages 626-631

  Iakoubovskii, K ^a   Mitsuishi, K ^a   Nakayama, Y ^a   Furuya, K ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

EELS; Inelastic scattering; Mean free path; TEM

Indexed keywords

DISSOCIATION; ELECTRON EMISSION; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ENERGY DISSIPATION; INELASTIC SCATTERING; THICKNESS MEASUREMENT;

ABSOLUTE CALIBRATION; ELECTRON ENERGY-LOSS SPECTROSCOPIES; INELASTIC ELECTRON SCATTERING; KRAMERS-KRONIG; LOG-RATIO METHOD; MEAN-FREE PATH; MEASUREMENTS OF; SPECTROSCOPY DATA; TEM; THICKNESS VALUE;

ELECTRON ENERGY LOSS SPECTROSCOPY;

ANALYTIC METHOD; ARTICLE; CALIBRATION; DIAGNOSTIC ACCURACY; ELECTRON ENERGY LOSS SPECTROSCOPY; LIGHT SCATTERING; MEASUREMENT; PRIORITY JOURNAL; THEORETICAL MODEL; THICKNESS;

EID: 49749149571     PISSN: 1059910X     EISSN: 10970029     Source Type: Journal    
DOI: 10.1002/jemt.20597     Document Type: Article

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