SCOPUS 정보 검색 플랫폼

Microelectronics Reliability

Volumn 50, Issue 9-11, 2010, Pages 1441-1445

Optimizing focused ion beam created solid immersion lenses in bulk silicon using design of experiments

(5) Scholz, P a Gallrapp, C a,c Kerst, U a Lundquist, T b Boit, C a

a TECHNISCHE UNIVERSITÄT BERLIN (Germany)

b DCG SYSTEMS INC (United States)

c CERN (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BULK SILICON; ION-BEAM SPUTTERING; PROCESSING TIME; SOLID IMMERSION LENS;

BEAM PLASMA INTERACTIONS; DESIGN OF EXPERIMENTS; FAILURE ANALYSIS; FOCUSED ION BEAMS; IMAGE RESOLUTION; ION BOMBARDMENT; IONS; LENSES; OPTICAL INSTRUMENTS; OPTIMIZATION; QUALITY ASSURANCE; SPUTTERING;

OPTICAL DATA STORAGE;

EID: 84755160739 PISSN: 00262714 EISSN: None Source Type: Journal
DOI: 10.1016/j.microrel.2010.07.031 Document Type: Conference Paper

Times cited : (6)

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