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Volumn 2, Issue , 2000, Pages 430-431
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High resolution subsurface microscopy technique
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
IMAGING TECHNIQUES;
OPTICAL INSTRUMENT LENSES;
OPTICAL RESOLVING POWER;
POLYSILICON;
HIGH RESOLUTION SUBSURFACE MICROSCOPY;
NUMERICAL APERTURE INCREASING LENS;
OPTICAL MICROSCOPY;
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EID: 0034476716
PISSN: 10928081
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (8)
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References (3)
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