Creation of solid immersion lenses in bulk silicon using focused ion beam backside editing technique

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2008, Pages 157-162

  Scholz, P ^a   Kerst, U ^a   Boit, C ^a   Tsao, C C ^b   Lundquist, T ^b  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b DCG SYSTEMS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR GAPS; BULK SILICONS; FIELD OF VIEWS; IMAGE CONTRASTS; LENS GEOMETRIES; LENS MATERIALS; MILLING PROCESS; N VALUES; PROCESSING TIME; SOLID IMMERSION LENS; SPATIAL RESOLUTIONS;

FOCUSED ION BEAMS; LENSES; MILLING (MACHINING); OPTICAL DATA STORAGE; OPTICAL INSTRUMENTS; OPTICAL PROPERTIES; QUALITY ASSURANCE; SAFETY FACTOR;

FAILURE ANALYSIS;

EID: 63549093398     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1361/cp2008istfal57     Document Type: Conference Paper

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