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Electrochimica Acta

Volumn 60, Issue , 2012, Pages 121-129

High performance sputtered LiCoO 2 thin films obtained at a moderate annealing treatment combined to a bias effect

(4) Tintignac, Sophie a,b Baddour Hadjean, Rita a Pereira Ramos, Jean Pierre a Salot, Raphaël b

a UNIVERSITÉ PARIS EST CRÉTEIL (France)

b CEA GRENOBLE (France)

Author keywords

LiCoO 2 thin films; Lithium microbattery; Raman spectroscopy; RF sputtering

Indexed keywords

ALUMINUM SUBSTRATE; ANNEALING TREATMENTS; BIAS EFFECTS; CAPACITY RETENTION; DEPOSITION PARAMETERS; ELECTROCHEMICAL BEHAVIOUR; GAS PRESSURES; HIGH SPECIFIC CAPACITY; LIQUID ELECTROLYTES; LITHIUM MICRO-BATTERY; MODERATE TEMPERATURE; PROMOTING EFFECT; RADIO FREQUENCY MAGNETRON SPUTTERING; RAMAN MICROSPECTROMETRY; RF SPUTTERING; SUBSTRATE BIAS; WORKING GAS PRESSURE; WORKING PRESSURES;

ALUMINUM COATINGS; ANNEALING; DEPOSITION; ELECTROCHEMICAL PROPERTIES; LITHIUM; RAMAN SPECTROSCOPY; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION;

PRESSURE EFFECTS;

EID: 84655162212 PISSN: 00134686 EISSN: None Source Type: Journal
DOI: 10.1016/j.electacta.2011.11.033 Document Type: Article

Times cited : (64)

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