The film growth and electrochemical properties of rf-sputtered LiCoO2 thin films

Journal of Alloys and Compounds

Volumn 436, Issue 1-2, 2007, Pages 303-308

  Liao, Cheng Lung ^a   Lee, Yueh Hsun ^a   Fung, Kuan Zong ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

GITT; HT LiCoO2; Li+ diffusion coefficient; Rf sputtering; SSCV; Thin film cathode

Indexed keywords

ANNEALING; CYCLIC VOLTAMMETRY; ELECTROCHEMICAL PROPERTIES; FILM GROWTH; LITHIUM ALLOYS; MAGNETRON SPUTTERING; SILICON;

GITT; HT-LICOO2; RF SPUTTERING; SSCV; THIN-FILM CATHODE;

THIN FILMS;

EID: 34047253418     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2006.07.033     Document Type: Article

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