LiCoO2 cathode thin film fabricated by RF sputtering for lithium ion microbatteries

Surface and Coatings Technology

Volumn 204, Issue 11, 2010, Pages 1710-1714

  Zhu, Xianjun ^a   Guo, Zaiping ^b   Du, Guodong ^b   Zhang, Peng ^b   Liu, Huakun ^b  

^a CENTRAL CHINA NORMAL UNIVERSITY   (China)

^b UNIVERSITY OF WOLLONGONG   (Australia)

Author keywords

LiCoO2; Lithium microbatteries; RF sputtering; Thin film

Indexed keywords

AMORPHOUS STRUCTURES; CATHODE THIN FILMS; CHARGE-DISCHARGE TESTS; CRYSTALLINITIES; CYCLING PERFORMANCE; ELECTROCHEMICAL CHARACTERISTICS; FILM STRUCTURE; FIRST DISCHARGE; GLASS SUBSTRATES; HIGH SUBSTRATE TEMPERATURE; LITHIUM COBALT OXIDES; LITHIUM ION MICROBATTERIES; LITHIUM MICROBATTERIES; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-SPUTTERING; ROOM TEMPERATURE; SUBSTRATE TEMPERATURE; THIN FILM CATHODES;

COBALT; LITHIUM; LITHIUM COMPOUNDS; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; MORPHOLOGY; OXIDE FILMS; PLATINUM; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILM DEVICES; THIN FILMS; X RAY CRYSTALLOGRAPHY;

AMORPHOUS FILMS;

EID: 74849131622     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.10.057     Document Type: Article

References (22)

1. Bates J.B., Dudney N.J., Neudecker B., Ueda A., and Evans C.D. Solid State Ionics 135 (2000) 33
2. Nimisha C.S., Ganapathi M., Munichandraiah N., and Rao G.M. Vacuum 83 (2009) 1001
3. Dudney N.J., and Neudecker B.J. Curr. Opin. Solid State Mater. Sci. 4 (1999) 479
4. Souquet J.L., and Duclot M. Solid State Ionics 148 (2002) 375
5. Kim K.W., Kim M.R., Lee S.W., Han K.S., and Woo S.I. Chem. Vapor Depos. 9 (2003) 187
6. Hayashi M., Takahashi M., and Shodai T. J. Power Sources 189 (2009) 416
7. Chiu K.F., Tang H.Y., and Lin B.S. J. Electrochem. Soc. 154 (2007) A364
8. Chiu K.F., and Chen P.Y. Surf. Coat. Technol. 203 (2008) 872
9. Yada C., Iriyama Y., Abe T., Kikuchi K., and Ogumi Z. Electrochem. Commun. 11 (2009) 413
10. Fleischauer M.D., Li J., and Brett M.J. J. Electrochem. Soc. 156 (2009) A33
11. Bates J.B., Gruzalski G.R., Dudney N.J., Luck C.F., and Yu X.H. Solid State Ionics 70 (1994) 619
12. Wang B., Bates J.B., Hart F.X., Sales B.C., Zuhr R.A., and Robertson J.D. J. Electrochem. Soc. 143 (1996) 3203
13. Bates J.B., Dudney N.J., Neudecker B.J., Hart F.X., Jun H.P., and Hackney S.A. J. Electrochem. Soc. 147 (2000) 59
14. Xia H., Lu L., and Meng Y.S. Appl. Phys. Lett. 92 (2008) 1
15. Chiu K.F., Lin H.C., Lin K.M., and Tsai C.H. J. Electrochem. Soc. 152 (2005) A2058
16. Kawamura J., Kuwata N., Toribami K., Sata N., Kamishima O., and Hattori T. Solid State Ionics 175 (2004) 273
17. Reddy M.V., Pecquenard B., Vinatier P., and Levasseur A. J. Phys. Chem. B 110 (2006) 4301
18. Matsushita T., Dokko K., and Kanamura K. J. Electrochem. Soc. 152 (2005) A2229
19. Wook J.S., and Lee S.M. J. Electrochem. Soc. 154 (2007) A22
20. Jang Y.I., Neudecker B.J., and Dudney N.J. Electrochem. Solid-State Lett. 4 (2001) A74
21. Huang W., and French R. Solid State Ionics 86-88 (1996) 395
22. Kim H.K., Seong T.Y., Lim J.H., Cho W.I., and Yoon Y.S. J. Power Sources 102 (2001) 167