Influence of sputtering gas pressure on the LiCoO2 thin film cathode post-annealed at 400°C

Korean Journal of Chemical Engineering

Volumn 23, Issue 5, 2006, Pages 832-837

  Park, Ho Young ^a   Nam, Sang Cheol ^a   Lim, Young Chang ^a   Choi, Kyu Gil ^a   Lee, Ki Chang ^a   Park, Gi Back ^a   Kim, Heesook Park ^b   Cho, Sung Baek ^c  

^a Nuricell Inc   (South Korea)

^b Kookmin University   (South Korea)

^c Agency for Defence Development   (South Korea)

Author keywords

Lithium cobalt oxide; Low temperature annealing; RF sputtering; Thin film battery

Indexed keywords

EID: 33845783717     PISSN: 02561115     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02705936     Document Type: Article

References (19)

1. 2 by laser ablation deposition," J. Appl. Phys., 76, 2799 (1994).
2. 2 thin films by laser ablation deposition," J. Electrochem. Soc., 140, 575 (1993).
3. 2 films;"J. Electrochem. Soc., 147, 59 (2000).
4. Bates, J. B., Dudney, N. J., Neudecker, B., Ueda, A. and Evans, C. D., "Thin-film lithium and lithium ion batteries," Solid Sate Ionics, 135, 33 (2000).
5. Bates, J. B., Gruzalski, G. R., Dudney, N. J., Luck, C. F., Yu, X.-H. and Jones, S. D., "Rechargeable thin-film lithium microbatteries," Solid State Technol, 36, 59 (1993).
6. Benqlilou-Moudden, H., Blondiaux, G., Vinatier, P. and Levasseur, A., "Amorphous lithium cobalt and nickel oxides thin films: preparation and characterization by RBS and PIGE," Thin Solid Films, 333, 16 (1998).
7. Bhat, M. H., Chakravarthy, B. P., Ramakrishnan, P. A., Levasseur, A. and Rao, K. J., "Microwave synthesis of electrode materials for lithium batteries," Bull. Mater. Sci., 23, 461 (2000).
8. 2 films," J. Electrochem. Soc., 148, A311 (2001).
9. 2 thin films for rechargeable microbatteries," J. Power Sources, 63, 187 (1996).
10. 2 electrode," Electrochem. Solid-state Lett., 2, 512 (1999).
11. 2 cathode for Li rechargeable microbattery," J Electrochem. Soc., 143, L268 (1996).
12. 2 thin film cathodes produced by r.f. sputtering," J. Power Sources, 81-82, 575 (1999).
13. 2," Solid State Ionics, 62, 53 (1993).
14. 2 films," J. Am. Ceram. Soc., 83, 2839 (2000).
15. 2 thin films produced with pulsed laser deposition," J. Electrochem. Soc., 143, 1821 (1996).
16. Wang, B., Bates, J. B., Hart, F. X., Sales, B. C., Zuhr, R. A. and Robertson, J. D., "Characterization of thin-film rechargeable lithium batteries with lithium cobalt oxide cathodes," J. Electrochem. Soc., 143, 3203 (1996).
17. 2 thin films," J. Power Sources, 103, 134 (2001).
18. Whitacre, J. F., West, W. C., Brandon, E. and Ratnakumar, B. V., "Crystallographically oriented thin-film nanocrystalline cathode layers prepared without exceeding 300°C," J. Electrochem. Soc., 148, A1078 (2001).
19. 2 synthesized by microwave energy," Solid State Ionics, 113-115, 11 (1998).