Fabrication of high aspect ratio nanostructures on 3D surfaces

Microelectronic Engineering

Volumn 88, Issue 9, 2011, Pages 3043-3048

  Senn, T ^a   Esquivel, J P ^b   Sabate N ^b   Lochel B ^a  

^a HAHN MEITNER INSTITUT   (Germany)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

3D structuring; Thermoforming; UV NIL

Indexed keywords

3D STRUCTURING; 3D SURFACE; CHEMICAL TREATMENTS; HIGH ASPECT RATIO NANO-STRUCTURES; HIGH ASPECT RATIO STRUCTURES; MATERIALS AND PROCESS; POLYDIMETHYLSILOXANE PDMS; REPLICA-MOLDING PROCESS; SOFT LITHOGRAPHY; STRUCTURED POLYMERS; STRUCTURED SUBSTRATE; SUPER-HYDROPHOBIC SURFACES; SURFACE CONTACT ANGLE; UV-NIL;

ANGLE MEASUREMENT; CONTACT ANGLE; FABRICATION; GLASS TRANSITION; HYDROPHOBICITY; MICROCHANNELS; NANOSTRUCTURES; REINFORCED PLASTICS; SUBSTRATES; SURFACE PROPERTIES; SURFACES; THERMOFORMING; THREE DIMENSIONAL;

ASPECT RATIO;

EID: 80051547235     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.05.004     Document Type: Article

References (26)

1. A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer Solar Energy 68 2000 357 360
2. A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, C. Zanke, B. Bläsi, A. Heinzel, W. Horbelt, D. Sporn, W. Döll, V. Wittwer, and J. Luther Solar Energy 62 1998 177 188
3. I. Park, J. Cheng, A.P. Pisano, E. Lee, and J. Jeong Applied Physics Letters 90 9 2007 093902 ISSN 00036951
4. Z. Guo, W. Liu, and B. Su Journal of Colloid and Interface Science 353 2 2011 335 355 ISSN 0021-9797
5. J. Feng, B. Huang, and M. Zhong Journal of Colloid and Interface Science 336 1 2009 268 272 ISSN 0021-9797
6. Z. Yuan, J. Xiao, J. Zeng, C. Wang, J. Liu, S. Xing, D. Jiang, G. Du, F. Yang, C. Peng, H. Chen, Q. Ye, and J. Tang Surface and Coatings Technology 205 7 2010 1947 1952 ISSN 0257-8972
7. O. Mertsch, D. Schondelmaier, I. Rudolph, O. Kutz, A.D. Walter, A. Schleunitz, J. Kouba, C. Waberski, and B. Löchel Journal of Adhesion Science and Technology 22 2008 1967 1983
8. M. Cardoso, V. Tribuzi, D. Balogh, L. Misoguti, and C. Mendon Applied Surface Science 257 8 2011 3281 3284 ISSN 0169-4332
9. J. Zimmermann, F.A. Reifler, U. Schrade, G.R. Artus, and S. Seeger Colloids and Surfaces A: Physicochemical and Engineering Aspects 302 1-3 2007 234 240 ISSN 0927-7757
10. N.J. Shirtcliffe, S. Aqil, C. Evans, G. McHale, M.I. Newton, C.C. Perry, and P. Roach Journal of Micromechanics and Microengineering 14 10 2004 1384 1389 ISSN 0960-1317
11. C.I. Park, H.E. Jeong, S.H. Lee, H.S. Cho, and K.Y. Suh Journal of Colloid and Interface Science 336 1 2009 298 303 ISSN 0021-9797
12. S. Kulinich, and M. Farzaneh Applied Surface Science 255 18 2009 8153 8157 ISSN 0169-4332
13. S. Kulinich, and M. Farzaneh Cold Regions Science and Technology 65 1 2011 60 64 ISSN 0165-232X
14. J. Howarter, and J. Youngblood Advanced Materials 19 22 2007 3838 3843 ISSN 09359648
15. J. Cheng, and L. Hsiung Biomedical Microdevices 6 4 2004 341 347 ISSN 1387-2176
16. C. Lu, Y. Xie, Y. Yang, M.M. Cheng, C. Koh, Y. Bai, L.J. Lee, and Y. Juang Analytical Chemistry 79 3 2007 994 1001
17. X. Liu, and C. Luo Journal of Micromechanics and Microengineering 20 2 2010 025029 ISSN 0960-1317
18. J.G. Fernandez, C.A. Mills, and J. Samitier Small (Weinheim an Der Bergstrasse, Germany) 5 5 2009 614 620 ISSN 1613-6829
19. M. Heilig, S. Giselbrecht, A. Guber, and M. Worgull Microsystem Technologies 16 7 2010 1221 1231 ISSN 0946-7076
20. T. Senn, C. Waberski, J. Wolf, J. Esquivel, N. Sabaté, and B. Löchel Microelectronic Engineering 88 1 2011 11 16 ISSN 0167-9317
21. H. Becker, and U. Heim Sensors and Actuators A: Physical 83 1-3 2000 130 135 ISSN 0924-4247
22. T. Senn, C. Mueller, and H. Reinecke Journal of Micromechanics and Microengineering 20 7 2010 075002 ISSN 0960-1317
23. Y.M. Kim, L. Konstanski, and J. MacGregor Polymer 44 2003 5103 5109
24. C. Decker, C. Bianchi, D. Decker, and F. Morel Progress in Organic Coatings 42 2001 253 266
25. Datasheet Elastosil RT 601, 2010.
26. T. Senn, J.P. Esquivel, M. Lörgen, N. Sabaté, and B. Löchel Replica molding for multilevel micro-/nanostructure replication Journal of Micromechanics and Microengineering 20 11 2010 115012 ISSN 0960-1317