Evidence of the filling of nano-porosity in SiO 2-like layers by an initiated-CVD monomer

Microporous and Mesoporous Materials

Volumn 151, Issue , 2012, Pages 434-439

  Aresta, Gianfranco ^a   Palmans, Jurgen ^a   Van De Sanden, Mauritius C M ^a,b   Creatore, Mariadriana ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

Author keywords

Ellipsometric porosimetry; Initiated CVD; Micro mesoporosity filling; Multilayer moisture diffusion barrier systems; SiO 2 like layers

Indexed keywords

ADSORPTION/DESORPTION; BARRIER LAYERS; ELLIPSOMETRIC POROSIMETRY; EXPERIMENTAL EVIDENCE; FILLING IN; GLOBAL BARRIERS; IN-SITU; INITIATED-CVD; INORGANIC LAYERS; LIQUID PHASE; MICRO/MESOPOROSITY; MOISTURE PERMEATION; MULTILAYER STRUCTURES; NANOPOROSITY; ORGANIC INTERLAYERS; ORGANIC LAYERS; OXYGEN BARRIER PROPERTIES; POLYMERIC SUBSTRATE; POLYMERIZATION PROCESS; SIO 2-LIKE LAYERS; SPECTROSCOPIC ELLIPSOMETRY MEASUREMENTS; TORTUOUS PATH;

FILLING; LIQUIDS; MOISTURE; MONOMERS; MULTILAYERS; POLYMERIZATION; POLYMERS; SILICON COMPOUNDS; SPECTROSCOPIC ELLIPSOMETRY;

CHEMICAL VAPOR DEPOSITION;

EID: 84155172562     PISSN: 13871811     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micromeso.2011.09.028     Document Type: Article

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