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Volumn 60, Issue 3, 2012, Pages 1346-1352

Enhanced dielectric and piezoelectric response in PZT superlattice-like films by leveraging spontaneous Zr/Ti gradient formation

Author keywords

Chemical solution deposition; Ferroelectric; Piezoelectricity; PZT thin films; Superlattice

Indexed keywords

AVERAGE COMPOSITION; CHEMICAL ROUTES; CHEMICAL SOLUTION DEPOSITION; COMPOSITIONAL GRADIENTS; DEPTH PROFILE; DIELECTRIC AND PIEZOELECTRIC PROPERTIES; DIELECTRIC PERMITTIVITIES; DIELECTRIC RESPONSE; ELECTRICAL DIPOLES; FERROELECTRIC; FILM SURFACES; GRADIENT FORMATION; HIGH ORDER; IN-PLANE; ORIENTED THIN FILMS; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC RESPONSE; PROCESSING METHOD; PZT; PZT THIN FILM; SATELLITE PEAKS; SECONDARY PHASIS; STACKING PERIODICITY; STRUCTURAL REFINEMENT; TETRAGONAL PHASIS; XRD;

EID: 83655197943     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2011.11.030     Document Type: Article
Times cited : (29)

References (39)
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    • PZT thin film growth and chemical composition control on flat and novel three-dimensional micro-machined structures for MEMS devices
    • PhD, Ecole Polytechnique Federale de Lusanne
    • Calame F. PZT thin film growth and chemical composition control on flat and novel three-dimensional micro-machined structures for MEMS devices. Material science and engineering. PhD, Ecole Polytechnique Federale de Lusanne; 2007.
    • (2007) Material Science and Engineering
    • Calame, F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.