Dielectric properties of Pb(Zr20Ti80)O3/Pb(Zr80Ti20 )O3 multilayered thin films prepared by rf magnetron sputtering

Applied Physics Letters

Volumn 82, Issue 17, 2003, Pages 2880-2882

  Wang, Can ^a,b   Fang, Q F ^b   Zhu, Z G ^b   Jiang, A Q ^c   Wang, S Y ^a   Cheng, B L ^a   Chen, Z H ^a  

^a INSTITUTE OF PHYSICS   (China)

^b INSTITUTE OF SOLID STATE PHYSICS   (China)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; LEAD COMPOUNDS; MAGNETRON SPUTTERING; MULTILAYERS; PERMITTIVITY; POLARIZATION;

COERCIVE VOLTAGE;

THIN FILMS;

EID: 0037621607     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1569658     Document Type: Article

References (14)

1. B. Noheda, D. E. Cox, G. Shirane, S. E. Park, L. E. Cross, and Z. Zhong, Phys. Rev. Lett. 86, 3891 (2001).
2. B. Noheda, D. E. Cox, G. Shirane, R. Guo, B. Jones, and L. E. Cross, Phys. Rev. B 63, 014103 (2001).
3. I. Kanno, S. Hayashi, R. Takayama, and T. Hirao, Appl. Phys. Lett. 68, 328 (1996).
4. A. Erbil, Y. Kim, and R. A. Gerjardt, Phys. Rev. Lett. 77, 1629 (1996).
5. K. H. Yoon, J. H. Shin, J. H. Park, and D. H. Rang, J. Appl. Phys. 83, 3626 (1998).
6. B. D. Qu, M. Evstigneev, D. J. Johnson, and R. H. Prince, Appl. Phys. Lett. 72, 1394 (1998).
7. F. Le Marrec, R. Farhi, B. Dkhil, J. Chevreul, and M. G. Karkut, J. Eur. Ceram. Soc. 21, 1615 (2001).
8. M. H. Corbett, R. M. Bowman, and J. M. Gregg, Appl. Phys. Lett. 79, 815 (2001).
9. T. Shimuta, O. Nakagawara, T. Makino, S. Arai, H. Tabata, and T. Kawai, J. Appl. Phys. 91, 2290 (2002).
10. M. Brazier, M. McElfresh, and S. Mansour, Appl. Phys. Lett. 72, 1121 (1998).
11. J. V. Matese, N. W. Schubring, A. L. Micheli, A. B. Catalan, M. S. Monhammed, R. Naik, and G. W. Auner, Appl. Phys. Lett. 71, 2047 (1997).
12. D. H. Bao, L. Y. Zhang, and X. Yao, Appl. Phys. Lett. 76, 1063 (2000).
13. A. Q. Jiang, J. F. Scott, M. Dawber, and C. Wang, J. Appl. Phys. 92, 6756 (2002).
14. J. H. Jang and K. H. Yoon, Appl. Phys. Lett. 75, 130 (1999).