Simulation of characteristics of a LiNbO 3/diamond surface acoustic wave

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 51, Issue 10, 2004, Pages 1308-1313

  Shikata, Shin Ichi ^a,b   Hachigo, Akihiro ^a,c   Nakahata, Hideaki ^a,c   Narita, Masashi ^a,d  

^a SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

^b Device Technologies Center   (Japan)

^c Semiconductor Research Laboratories

^d CAE Center

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANCIAL COUPLING; PHASE VELOCITY; RAYLEIGHWAVE; WAFER BONDING;

ACOUSTIC SURFACE WAVE DEVICES; BANDWIDTH; INTELLIGENT VEHICLE HIGHWAY SYSTEMS; LITHOGRAPHY; LOCAL AREA NETWORKS; OPTICAL FILTERS; OSCILLATIONS; SILICA; SINGLE CRYSTALS;

LITHIUM COMPOUNDS;

EID: 8344268589     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1350959     Document Type: Article

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