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Volumn 81, Issue 7, 2002, Pages 1329-1331
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Thick LiNbO3 layers on diamond-coated silicon for surface acoustic wave filters
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Author keywords
[No Author keywords available]
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Indexed keywords
CELLULAR PHONE;
COUPLING FACTOR;
DIAMOND-COATED SILICON;
ELECTRICAL MEASUREMENT;
FILTER RESPONSE;
FREQUENCY FILTERS;
HIGH VELOCITY;
LAYERED STRUCTURES;
LITHIUM NIOBATE;
MULTI-LAYERED STRUCTURE;
MULTI-STEP;
RF-MAGNETRON SPUTTERING;
SAW DEVICE;
SURFACE ACOUSTIC WAVES;
TECHNOLOGY-BASED;
ACOUSTIC SURFACE WAVE DEVICES;
ACOUSTIC WAVES;
ACOUSTICS;
ACOUSTOELECTRIC EFFECTS;
CELLULAR TELEPHONE SYSTEMS;
COMMUNICATION SYSTEMS;
FILM GROWTH;
LITHIUM;
MAGNETRON SPUTTERING;
SURFACE MORPHOLOGY;
SURFACE ROUGHNESS;
ACOUSTIC SURFACE WAVE FILTERS;
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EID: 79956037836
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1501156 Document Type: Article |
Times cited : (26)
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References (10)
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