SAW resonators of SiO2/ZnO/diamond structure in GHz range

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2000, Pages 315-320

  Nakahata, H ^a   Hachigo, A ^a   Itakura, K ^a   Fujii, S ^a   Shikata, S ^a  

^a SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; CALCULATIONS; CHEMICAL VAPOR DEPOSITION; CRYSTAL RESONATORS; DIAMONDS; INSERTION LOSSES; NATURAL FREQUENCIES; POLYCRYSTALLINE MATERIALS; SILICA; ZINC OXIDE;

ELECTROMECHANICAL COUPLING COEFFICIENT; INTERDIGITAL TRANSDUCERS; SECOND SEZAWA MODE; SURFACE ACOUSTIC WAVE RESONATORS; TEMPERATURE COEFFICIENT OF FREQUENCY;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0034449792     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (24)

1. Proc. 6th conf. solid state devices 1974