Influence of substrate bias on practical adhesion, toughness, and roughness of reactive de-sputtered zirconium nitride films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 5, 2004, Pages 2041-2047

  Chen, Cheng Shi ^a   Liu, Chuan Pu ^a   Yang, Heng Ghieh ^a   Tsao, C Y A ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; FRACTURE TOUGHNESS; INDENTATION; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS;

DIFFUSION BARRIERS; NANOINDENTATION; SCRATCH TESTING; SUBSTRATE BIAS;

ZIRCONIUM COMPOUNDS;

EID: 8344247734     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1782635     Document Type: Review

References (29)

1. L. Krusin-Elbaum, M. Wittmer, C. Y. Ting, and J. J. Cuomo, Thin Solid Films 104, 81 (1983).
2. M. Dstling, S. Nygren, C. S. Petersson, R. Buchta, H.-O. Blom, and S. Berg, Thin Solid Films 145, 81 (1986).
3. M. B. Takeymam, T. Itoi, E. Aoyagi, and A. Noya, Appl. Surf. Sci. 190, 450 (2002).
4. S. Horita, M. Kobayashi, H. Akahori, and T. Hata, Surf. Coat. Technol. 66, 318 (1994).
5. U. K. Wiiala, I. M. Penttinen, and A. S. Korhonen, Surf. Coat. Technol. 41, 191 (1990).
6. P. Panjan, B. Navinsek, A. Zabkar, D. Mandrino, and J. Fiser, Thin Solid Films 228, 233 (1993).
7. I. Ivanor, P. Kazansky, L. Hultman, I. Petra, and J.-E. Sundgren, J. Vac. Sci. Teehnol. A 12, 314 (1994).
8. A. A. Volinsky, N. R. Moody, and W. V. Gerberich, Acta Mater. 50, 441 (2002).
9. W. J. Chou, G. P. Yu, and J. H. Huang, Thin Solid Films 405, 162 (2002).
10. J. V. Ramana, S. Kumar, C. David, A. K. Ray, and V. S. Raju, Mater. Lett. 43, 73 (2000).
11. J. Valli, U. Makela, A. Matthews, and V. Murawa, J. Vac. Sci. Technol. A 3, 2411 (1985).
12. P. A. Steinmann and H. E. Hintermann, J. Vac. Sci. Technol. A 3, 2394 (1985).
13. W. D. Sproul, J. Vac. Sci. Technol. A 4, 2874 (1986).
14. P. J. Burnett and D. S. Rickerby, Thin Solid Films 157, 233 (1988).
15. Y. Xie and H. M. Hawthorne, Surf. Coat. Technol. 155, 121 (2002).
16. M. F. Doemer and W. D. Nix, J. Mater. Res. 1, 601 (1986).
17. B. R. Lawn, A. G. Evans, and D. B. Marshall, J. Am. Ceram. Soc. 63, 574 (1980).
18. P. J. Burnett and D. S. Rickerby, Thin Solid Films 154, 403 (1987).
19. S. J. Bull, Surf. Coat. Technol. 50, 25 (1991).
20. R. D. Arnell, Surf. Coat. Technol. 43/41, 674 (1990).
21. J. L. Loubet, J. M. Georges, O. Marchesini, and G. Meille, ASME J. Tribol. 106, 43 (1984).
22. K. L. Mittal, Adhesion Measurement of Films and Coatings, Utrecht, The Netherlands, 1995, p. 115.
23. P. Patsalas, C. Charitidis, and S. Logothetidis, Surf. Coat. Technol. 125, 335 (2000)
24. W.-J. Chou and G.-P. Yu, Thin Solid Films 405, 162 (2002).
25. M. F. Ashby and D. R. H. Jones, Engineering Materials, Dergaman, 1981.
26. N. R. Moody and R. Q. Hwang. Acta Mater. 46 585 (1998).
27. E. Kelesoglu and C. Mitterer, Surf. Coat. Technol. 116, 133 (1999).
28. K. J. Ma, A. Bloyce, and T. Bell, Surf. Coat. Technol. 76/77, 297 (1995).
29. C. W. Jennings, J. Adhes. 4, 25 (1972).