High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems

Applied Surface Science

Volumn 190, Issue 1-4, 2002, Pages 450-454

  Takeyama, Mayumi B ^a   Itoi, Takaomi ^a   Aoyagi, Eiji ^b   Noya, Atsushi ^a  

^a KITAMI INSTITUTE OF TECHNOLOGY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Contacts; Diffusion barriers; Metallization; Nano crystalline; ZrN

Indexed keywords

ANNEALING; DIFFUSION; GRAIN GROWTH; HIGH TEMPERATURE EFFECTS; METALLIZING; NANOSTRUCTURED MATERIALS; SPUTTERING; THERMODYNAMIC STABILITY; ZIRCONIUM COMPOUNDS;

DIFFUSION BARRIERS;

THIN FILMS;

EID: 0037041988     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00916-3     Document Type: Article

References (7)