Phase-conjugate holographic lithography based on micromirror array recording

Applied Optics

Volumn 50, Issue 34, 2011, Pages

  Lim, Yongjun ^a   Hahn, Joonku ^b   Lee, Byoungho ^a  

^a Seoul National University   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

HOLOGRAMS; HOLOGRAPHY;

DEMAGNIFICATION; DIGITAL MICRO-MIRROR DEVICE; HOLOGRAPHIC LITHOGRAPHY; LITHOGRAPHIC SYSTEMS; LITHOGRAPHY SYSTEMS; MICROMIRROR ARRAY; PHASE CONJUGATES; UNEVEN SURFACES;

LITHOGRAPHY;

EID: 83155193175     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.50.000H68     Document Type: Article

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