Status and future of maskless lithography

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 951-955

  Henry, Daniel ^a   Gemmink, Jan Willem ^b   Pain, Laurent ^c   Postnikov, Sergei V ^d  

^a STMICROELECTRONICS   (France)

^b NXP SEMICONDUCTORS   (Netherlands)

^c CEA LETI   (France)

^d Freescale   (France)

Author keywords

Cost of ownership; Maskless lithography

Indexed keywords

COMPUTER SIMULATION; COSTS; ELECTRONS; MANUFACTURE; OPTICAL RESOLVING POWER;

COST OF OWNERSHIP; LOW VOLUME PRODUCTION; MASKLESS LITHOGRAPHY; ML2;

LITHOGRAPHY;

EID: 33646029711     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.12.016     Document Type: Article

References (10)

1. L. Pain, B. Icard, S. Manakli, J. Todeschini, B. Minghetti, V. Wang, D. Henry, From R&D to Manufacturing: the Insertion of EBDW Lithography into a Production Flow, in: Proceedings of Micro-and Nano-Engineering (in press).
2. Available from: .
3. S. Edler-Kapl et al., Projection Mask less Lithography: First Results from Multi Beam Blanking Demonstrator, in: Proceedings of Micro-and Nano-Engineering (in press).
4. M. Mohaupt, et al., Assembly of an Aperture Plate System for Projection Maskless Lithography, in: Proceedings of Micro-and Nano-Engineering (in press).
5. Yamada A., and Yabe T. J. Vac. Sci. Tech. B 22 (2004) 2917
6. J. Spallas, A Manufacturable Miniature Electron Beam Column, in: Proceedings of Micro-and Nano-Engineering (in press).
7. E. Platzgummer et al., Simulation of Ion Beam Direct Structuring for 3D nano-imprint Template Fabrication, in: Proceedings of Micro-and Nano-Engineering (in press).
8. U. Dauderstädt et al., SLM Technology for Microlithography, in: Proceedings of Micro-and Nano-Engineering (in press).
9. A. Bleeker et al., Optical Maskless Lithography for fast and economical design to wafer, Proceedings of Micro-and Nano-Engineering (in press).
10. H. Smith, Comparison of Optical and Charged Particle Maskless lithography, Proceedings of Micro-and Nano-Engineering (in press).