Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication

Applied Optics

Volumn 50, Issue 35, 2011, Pages 6536-6542

  Tang, Min ^a   Chen, Zai Chun ^a   Huang, Zhi Qiang ^a   Choo, Yoo Sang ^a   Hong, Ming Hui ^a,b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b DATA STORAGE INSTITUTE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MICROSTRUCTURE; NANOSTRUCTURES; TERAHERTZ WAVES;

COMPLICATED STRUCTURES; HYBRID NANOSTRUCTURES; LATERAL DIMENSION; MICROSTRUCTURE FABRICATION; MULTIPLE BEAM LASERS; SILICON SUBSTRATES; SPLIT RING RESONATOR; SURFACE PLASMONIC RESONANCES;

LITHOGRAPHY;

GOLD; NANOMATERIAL; SILICON;

ARTICLE; CHEMISTRY; INSTRUMENTATION; LASER; METHODOLOGY; NANOTECHNOLOGY; PRINTING; SURFACE PLASMON RESONANCE; SURFACE PROPERTY;

GOLD; LASERS; NANOSTRUCTURES; NANOTECHNOLOGY; PRINTING; SILICON; SURFACE PLASMON RESONANCE; SURFACE PROPERTIES;

EID: 83155176008     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.50.006536     Document Type: Article

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