Design, fabrication and testing of a micromachined integrated tunable microlens

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1221-1226

  Wang, Weisong ^a,b   Fang, Ji ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

^b Lehigh University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BIOPOLYMERS; MICROMACHINING; NUMERICAL ANALYSIS; OPTICAL COLLIMATORS; OPTICAL COMMUNICATION; OPTICAL SENSORS; PHOTODETECTORS; PHOTOGRAPHIC FILMS;

BIOPHOTONIC APPLICATIONS; CONFOCAL IMAGING SYSTEMS; DISK RECORDING SYSTEMS; INTEGRATED TUNABLE MICROLENS;

MICROLENSES;

EID: 33745086554     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/015     Document Type: Article

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