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Volumn 45, Issue 19, 2006, Pages 4554-4562

Pixelated mask spatial carrier phase shifting interferometry algorithms and associated errors

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; INTERFEROMETRY; LITHOGRAPHY; WAVEFRONTS;

EID: 33746173435     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.004554     Document Type: Article
Times cited : (72)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.