Dynamic measurements using a Fizeau interferometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8082, Issue , 2011, Pages

  Sykora, Daniel M ^a   Holmes, Michael L ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

Dynamic measurements; Instantaneous interferometry; Live phase; Stabilized HeNe laser

Indexed keywords

COHERENT OPTICS; DYNAMIC DATA; DYNAMIC MEASUREMENT; ENVIRONMENTAL NOISE; FIZEAU INTERFEROMETERS; FIZEAU-TYPE INTERFEROMETERS; HE-NE LASERS; INSTANTANEOUS MEASUREMENT; LASER SOURCES; LATERAL RESOLUTION; LIGHT EFFICIENCY; LIVE PHASE; OBJECT MOTION; OPTICAL TEST; PHASE SHIFTING METHODS; SINGLE CAMERAS; SINGLE-SHOT; SURFACE PROFILES; ZERNIKE;

HELIUM NEON LASERS; LASER OPTICS; LIGHT; OPTICAL DATA PROCESSING; OPTICAL TESTING; OPTICAL VARIABLES MEASUREMENT;

INTERFEROMETRY;

EID: 81855178028     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.890853     Document Type: Conference Paper

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