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Journal of Materials Chemistry

Volumn 21, Issue 38, 2011, Pages 14456-14460

Supported pyrolysis for lithographically defined 3D carbon microstructures

(2) Jin, Woo Min a Moon, Jun Hyuk a

a Sogang University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CARBONIZATION; ELECTRIC CONDUCTIVITY; LITHOGRAPHY; MICROSTRUCTURE; PHOTORESISTS; PYROLYSIS; RAMAN SPECTROSCOPY; SHRINKAGE; SILICA; THREE DIMENSIONAL;

AFM; CARBON MICROSTRUCTURES; CARBON STRUCTURES; ELECTRICAL CONDUCTIVITY; HIGH FIDELITY; HIGH-TEMPERATURE PYROLYSIS; INTERFERENCE LITHOGRAPHY; LAYER-BY-LAYERS; MASS LOSS; MECHANICAL SUPPORT; MICRO DEVICES; PHOTORESIST PATTERNS; POROUS STRUCTURES; PYROLYZED CARBON; RESIST PATTERN; SILICA SHELL; SU-8 MICROSTRUCTURES; SU-8 PHOTORESIST; WOODPILE STRUCTURE;

GLASSY CARBON;

EID: 81855205187 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/c1jm10599j Document Type: Article

Times cited : (11)

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