Design and fabrication of a metallic MEMS gripper using electro-thermal V-shape and modified U-shape actuators

Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011

Volumn 2, Issue , 2011, Pages 353-356

  Khazaai, Jay J ^a   Qu, H ^a   Shillor, M ^a   Smith, L ^a   Cheok, Ka C ^a  

^a OAKLAND UNIVERSITY   (United States)

Author keywords

Electro thermal; MEMS; MetalMUMPs; Micro actuator; Micro gripper

Indexed keywords

ELECTRO-THERMAL; ELECTRO-THERMALLY DRIVEN; ELECTROPLATED NICKEL; IN-PLANE DISPLACEMENT; LOW OPERATING VOLTAGE; METALLIC STRUCTURES; METALMUMPS; MICRO GRIPPER; OPERATING VOLTAGE RANGE; TIP DISPLACEMENT; V-SHAPE;

ACTUATORS; FABRICATION; FLUIDICS; MEMS; MICROOPTICS; NANOTECHNOLOGY; NICKEL PLATING;

GRIPPERS;

EID: 81455140659     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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