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Volumn 58, Issue 5, 2011, Pages 1062-1068

C-Axis Zig-Zag ZnO film ultrasonic transducers for designing longitudinal and shear wave resonant frequencies and modes

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC MASS; EVEN LAYERS; FILM SURFACES; FREQUENCY CHARACTERISTIC; LONGITUDINAL WAVES; LOW TEMPERATURE BUFFER LAYERS; MULTI-LAYERED; NON DESTRUCTIVE EVALUATION; PIEZOELECTRIC FILM; RESONANT FREQUENCIES; TRANSMISSION LINE MODELS; WAVE CONVERSION; ZIG-ZAG; ZNO; ZNO FILMS;

EID: 79957793152     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2011.1906     Document Type: Article
Times cited : (56)

References (22)
  • 1
    • 0343430428 scopus 로고
    • Ultrasonic transducers for simultaneous generation of longitudinal and shear waves
    • Jul.
    • C .-K. Jen, K. Sreenivas, and M. Sayer, "Ultrasonic transducers for simultaneous generation of longitudinal and shear waves," J. Acoust. Soc. Am., vol. 84, no. 1, pp. 26-29, Jul. 1988.
    • (1988) J. Acoust. Soc. Am. , vol.84 , Issue.1 , pp. 26-29
    • Jen, C.-K.1    Sreenivas, K.2    Sayer, M.3
  • 2
    • 0033700476 scopus 로고    scopus 로고
    • Simultaneous generation of longitudinal and shear bulk ultrasonic waves in solids
    • Jun
    • J. M. Rouvaen, A. Menhaj-Rivenq, P. Logette, P. Goutin, and F. Haine, "Simultaneous generation of longitudinal and shear bulk ultrasonic waves in solids," J. Phys. D, vol. 33, no. 11, pp. 1287-1297, Jun. 2000.
    • (2000) J. Phys. D , vol.33 , Issue.11 , pp. 1287-1297
    • Rouvaen, J.M.1    Menhaj-Rivenq, A.2    Logette, P.3    Goutin, P.4    Haine, F.5
  • 3
    • 33750717213 scopus 로고    scopus 로고
    • High temperature integrated ultrasonic shear wave probes
    • Oct, Art. No. 183506
    • C .-K. Jen, Y. Ono, and M. Kobayashi, "High temperature integrated ultrasonic shear wave probes," Appl. Phys. Lett., vol. 89, no. 18, art. no. 183506, Oct. 2006.
    • (2006) Appl. Phys. Lett. , vol.89 , Issue.18
    • Jen, C.-K.1    Ono, Y.2    Kobayashi, M.3
  • 6
    • 33846579142 scopus 로고    scopus 로고
    • Sensing characteristics of high-frequency shear mode resonators in glycerol solutions
    • DOI 10.1016/j.snb.2006.03.055, PII S0925400506002565
    • M. Link, J. Weber, M. Schreiter, W. Wersing, O. Elmazria, and P. Alnot, "Sensing characteristics of high-frequency shear mode resonators in glycerol solutions," Sens. Actuators B, vol. 121, no. 2, pp. 372-378, Feb. 2007. (Pubitemid 46186882)
    • (2007) Sensors and Actuators, B: Chemical , vol.121 , Issue.2 , pp. 372-378
    • Link, M.1    Weber, J.2    Schreiter, M.3    Wersing, W.4    Elmazria, O.5    Alnot, P.6
  • 7
    • 33947645345 scopus 로고    scopus 로고
    • Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media
    • DOI 10.1016/j.snb.2006.09.028, PII S0925400506006605
    • G. Wingqvist, J. Bjurstrom, L. Liljeholm, V. Yantchev, and I. Katardjiev, "Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media," Sens. Actuators B, vol. 123, no. 1, pp. 466-473, Apr. 2007. (Pubitemid 46497729)
    • (2007) Sensors and Actuators, B: Chemical , vol.123 , Issue.1 , pp. 466-473
    • Wingqvist, G.1    Bjurstrom, J.2    Liljeholm, L.3    Yantchev, V.4    Katardjiev, I.5
  • 8
    • 34548133546 scopus 로고    scopus 로고
    • Characteristics of pure-shear mode BAW resonators consisting of (11-20) textured ZnO films
    • Aug.
    • T. Yanagitani, M. Kiuchi, M. Matsukawa, and Y. Watanabe, "Characteristics of pure-shear mode BAW resonators consisting of (11-20) textured ZnO films," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 54, no. 8, pp. 1680-1686, Aug. 2007.
    • (2007) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.54 , Issue.8 , pp. 1680-1686
    • Yanagitani, T.1    Kiuchi, M.2    Matsukawa, M.3    Watanabe, Y.4
  • 9
    • 0008757578 scopus 로고
    • Temperature dependence of the electroacoustical constants of Li-doped ZnO single crystals
    • R. T. Smith and V. E. Stubblefield, "Temperature dependence of the electroacoustical constants of Li-doped ZnO single crystals," J. Acoust. Soc. Am., vol. 46, p. 105, 1969.
    • (1969) J. Acoust. Soc. Am. , vol.46 , pp. 105
    • Smith, R.T.1    Stubblefield, V.E.2
  • 11
    • 56949105812 scopus 로고    scopus 로고
    • Thickness vibration of piezoelectric plates of 6 mm crystals with tilted six-fold axis and two-layered thick electrodes
    • Feb.
    • J. Du, K. Xian, J. Wang, and J. Yang, "Thickness vibration of piezoelectric plates of 6 mm crystals with tilted six-fold axis and two-layered thick electrodes," Ultrasonics, vol. 49, no. 2, pp. 149-152, Feb. 2009.
    • (2009) Ultrasonics , vol.49 , Issue.2 , pp. 149-152
    • Du, J.1    Xian, K.2    Wang, J.3    Yang, J.4
  • 12
    • 77953625789 scopus 로고    scopus 로고
    • Analysis of dual-mode thin film bulk acoustic resonators based on polar c-axis tilted wurtzite gallium nitride
    • Jun. Art. No. 114102
    • L. Qin and Q.-M. Wang, "Analysis of dual-mode thin film bulk acoustic resonators based on polar c-axis tilted wurtzite gallium nitride," J. Appl. Phys., vol. 107, no. 11, art. no. 114102, Jun. 2010.
    • (2010) J. Appl. Phys. , vol.107 , Issue.11
    • Qin, L.1    Wang, Q.-M.2
  • 13
    • 48149101090 scopus 로고    scopus 로고
    • Highly oriented c-axis 23° tilted ZnO films with high quasi-shear mode electromechanical coupling coefficients
    • T. Matsuo, T. Yanagitani, M. Matsukawa, and Y. Watanabe, "Highly oriented c-axis 23° tilted ZnO films with high quasi-shear mode electromechanical coupling coefficients," in Proc. IEEE Ultrason. Symp., 2007, pp. 1229-1232.
    • (2007) Proc. IEEE Ultrason. Symp. , pp. 1229-1232
    • Matsuo, T.1    Yanagitani, T.2    Matsukawa, M.3    Watanabe, Y.4
  • 14
    • 1842427341 scopus 로고    scopus 로고
    • Thickness dependence of the properties of highly c-axis textured AlN thin films
    • Feb.
    • F. Martin, P. Muralt, M.-A. Dubois, and A. Pezous, "Thickness dependence of the properties of highly c-axis textured AlN thin films," J. Vac. Sci. Technol. A, vol. 22, no. 2, pp. 361-365, Feb. 2004.
    • (2004) J. Vac. Sci. Technol. A , vol.22 , Issue.2 , pp. 361-365
    • Martin, F.1    Muralt, P.2    Dubois, M.-A.3    Pezous, A.4
  • 15
    • 33747489654 scopus 로고    scopus 로고
    • Local epitaxial growth of aluminum nitride and molybdenum thin films in fiber texture using aluminum nitride interlayer
    • Aug, Art. No. 071919
    • T. Kamohara, M. Akiyama, N. Ueno, K. Nonaka, and N. Kuwano, "Local epitaxial growth of aluminum nitride and molybdenum thin films in fiber texture using aluminum nitride interlayer," Appl. Phys. Lett., vol. 89, no. 7, art. no. 071919, Aug. 2006.
    • (2006) Appl. Phys. Lett. , vol.89 , Issue.7
    • Kamohara, T.1    Akiyama, M.2    Ueno, N.3    Nonaka, K.4    Kuwano, N.5
  • 16
    • 36849104907 scopus 로고
    • Insertion loss and coupling factors in thin-film transducers
    • Aug.
    • N. F. Foster and A. H. Meitzler, "Insertion loss and coupling factors in thin-film transducers," J. Appl. Phys., vol. 39, no. 9, pp. 4460-4461, Aug. 1968.
    • (1968) J. Appl. Phys. , vol.39 , Issue.9 , pp. 4460-4461
    • Foster, N.F.1    Meitzler, A.H.2
  • 17
    • 0037946995 scopus 로고    scopus 로고
    • Resonant spectrum method to characterize piezoelectric films in composite resonators
    • Mar.
    • Y. Zhang, Z. Wang, and J. D. N. Cheeke, "Resonant spectrum method to characterize piezoelectric films in composite resonators," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 50, no. 3, pp. 321-333, Mar. 2003.
    • (2003) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.50 , Issue.3 , pp. 321-333
    • Zhang, Y.1    Wang, Z.2    Cheeke, J.D.N.3
  • 18
    • 34548460232 scopus 로고    scopus 로고
    • Control of in-plane and out-of-plane texture in shear mode piezoelectric ZnO films by ion-beam irradiation
    • Aug.
    • T. Yanagitani and M. Kiuchi, "Control of in-plane and out-of-plane texture in shear mode piezoelectric ZnO films by ion-beam irradiation," J. Appl. Phys., vol. 102, no. 4, pp. 044115, Aug. 2007.
    • (2007) J. Appl. Phys. , vol.102 , Issue.4 , pp. 044115
    • Yanagitani, T.1    Kiuchi, M.2
  • 19
  • 21
    • 34547589151 scopus 로고    scopus 로고
    • Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (11-20) textured ZnO films
    • Jul, Art. No. 024110
    • T. Yanagitani, M. Kiuchi, M. Matsukawa, and Y. Watanabe, "Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (11-20) textured ZnO films," J. Appl. Phys., vol. 102, no. 2, art. no. 024110, Jul. 2007.
    • (2007) J. Appl. Phys. , vol.102 , Issue.2
    • Yanagitani, T.1    Kiuchi, M.2    Matsukawa, M.3    Watanabe, Y.4
  • 22
    • 29144452568 scopus 로고
    • Performance of shear mode zinc oxide thin-film ultrasonic transducers
    • Sep.
    • N. F. Foster, "Performance of shear mode zinc oxide thin-film ultrasonic transducers," J. Appl. Phys., vol. 40, pp. 4202-4204, Sep. 1969.
    • (1969) J. Appl. Phys. , vol.40 , pp. 4202-4204
    • Foster, N.F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.