Effect of Mg doping on the hydrogen-sensing characteristics of ZnO thin films

Sensors and Actuators, B: Chemical

Volumn 160, Issue 1, 2011, Pages 266-270

  Liu, Yanxia ^a   Hang, Tao ^b   Xie, Yizhu ^a   Bao, Zhong ^a   Song, Jie ^a   Zhang, Hongliang ^a   Xie, Erqing ^a  

^a LANZHOU UNIVERSITY   (China)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Hydrogen sensing; Mechanism; Mg0.1Zn0.9O; PLD; ZnO

Indexed keywords

CRYSTALLINE QUALITY; GAS RESPONSE; GAS SENSING MECHANISM; HYDROGEN-SENSING; MG-DOPING; SENSING PERFORMANCE; SENSOR RESPONSE; SMOOTH SURFACE; ZNO; ZNO FILMS; ZNO THIN FILM;

DEPOSITION; HYDROGEN; MECHANISMS; METALLIC FILMS; PULSED LASER DEPOSITION; SAPPHIRE; SENSORS; ZINC; ZINC OXIDE;

SEMICONDUCTOR DOPING;

EID: 81155130995     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.07.046     Document Type: Article

References (37)

1. J. Ogden High Hopes for hydrogen Sci. Am. 295 2006 94 101
2. S.J. Pearton, F. Ren, Y.-L. Wang, B.H. Chu, K.H. Chen, C.Y. Chang, W. Lim, J. Lin, and D.P. Norton Recent advances in wide bandgap semiconductor biological and gas sensors Prog. Mater. Sci. 55 2010 1 59
3. S.J. Pearton, D.P. Norton, K. Ip, Y.W. Heo, and T. Steiner Recent progress in processing and properties of ZnO Prog. Mater. Sci. 50 2005 293 340
4. O. Lupan, L. Chow, and G. Chai A single ZnO tetrapod-based sensor Sens. Actuators B 141 2009 511 517
5. O. Lupan, G. Chai, and L. Chow Novel hydrogen gas sensor based on single ZnO nanorod Microelectron. Eng. 85 2008 2220 2225
6. 3 formulation Meas. Sci. Technol. 9 1998 360 364
7. L.-J. Bie, X.-N. Yan, J. Yin, Y.-Q. Duan, and Z.-H. Yuan Nanopillar ZnO gas sensor for hydrogen and ethanol Sens. Actuators B 126 2007 604 608
8. H.T. Wang, B.S. Kang, and F. Ren Hydrogen-selective sensing at room temperature with ZnO nanorods Appl. Phys. Lett. 86 2005 243503
9. D. Calestani, M. Zha, R. Mosca, A. Zappettini, M.C. Carotta, V. Di Natale, and L. Zanotti Growth of ZnO tetrapods for nanostructure-based gas sensors Sens. Actuators B 144 2010 472 478
10. S.-H. Choi, G. Ankonina, D.-Y. Youn, S.-G. Oh, J.-M. Hong, A. Rothschild, and I.-D. Kim Hollow ZnO nanofibers fabricated using electrospun polymer templates and their electronic transport properties ACS Nano 3 2009 2623 2631
11. M.C. Carotta, A. Cervi, V. di Natale, S. Gherardi, A. Giberti, V. Guidi, D. Puzzovio, B. Vendemiati, G. Martinelli, M. Sacerdoti, D. Calestani, A. Zappettini, M. Zha, and L. Zanotti ZnO gas sensors: a comparison between nanoparticles and nanotetrapods-based thick films Sens. Actuators B 137 2009 164 169
12. L.C. Tien, P.W. Sadik, D.P. Norton, L.F. Voss, and S.J. Pearton Hydrogen sensing at room temperature with Pt-coated ZnO thin films and nanorods Appl. Phys. Lett. 87 2005 222106
13. V. Kobrinsky, A. Rothschild, V. Lumelsky, Y. Komem, and Y. Lifshitz Tailoring the gas sensing properties of ZnO thin films through oxygen nonstoichiometry Appl. Phys. Lett. 93 2008 113502
14. B.L. Zhu, C.S. Xie, D.W. Zeng, W.L. Song, and A.H. Wang Investigation of gas sensitivity of Sb-doped ZnO nanoparticles Mater. Chem. Phys. 89 2005 148 153
15. P. Bhattacharyya, P.K. Basu, C. Lang, H. Saha, and S. Basu Noble metal catalytic contacts to sol-gel nanocrystalline zinc oxide thin films for sensing methane Sens. Actuators B 129 2008 551 557
16. S.T. Shishiyanu, T.S. Shishiyanu, and O.I. Lupan Sensing characteristics of tin-doped ZnO thin films as NO2 gas sensor Sens. Actuators B 107 2005 379 386
17. J.F. Chang, H.H. Kuo, I.C. Leu, and M.H. Hon The effects of thickness and operation temperature on ZnO:Al thin film CO gas sensor Sens. Actuators B 84 2002 258 264
18. A.L. Yang, H.Y. Wei, X.L. Liu, H.P. Song, H.B. Fan, P.F. Zhang, G.L. Zheng, S.Y. Yang, Q.S. Zhu, and Z.G. Wang Characterization of ZnMgO hexagonal-nanotowers/films on m-plane sapphire synthesized by metal organic chemical vapour deposition J. Phys. D: Appl. Phys. 41 2008 205416
19. 1-xO films by sputtering Vacuum 82 2008 459 462
20. 3: solubility limit and the effect of doping on the resistivity and ethanol sensitivity Sens. Actuators B 9 1992 49 53
21. 3 nanocrystals Sens. Actuators B 129 2008 53 58
22. D.C. Kim Structural transition from MgZnO nanowires to ultrathin nanowalls by surface separation: growth evolution and gas sensing properties Nanotechnology 21 2010 425503
23. xO nanocomposite thin films Sol. Energy Mater. Sol. Cells 93 2009 193 198
24. xO films by pulsed laser ablation Thin Solid Films 486 2005 174 177
25. W. Wang, A.S. Lin, J.D. Phillips, and W.K. Metzger Generation and recombination rates at ZnTe:O intermediate band states Appl. Phys. Lett. 95 2009 261107
26. A.A. Ramadan, R.D. Gould, and A. Ashour On the Van der Pauw method of resistivity measurements Thin Solid Films 239 1994 272 275
27. P. Bhattacharya, R.R. Das, and R.S. Katiyar Fabrication of stable wide-band-gap ZnO/MgO multilayer thin films Appl. Phys. Lett. 83 2003 2010 2012
28. Y. Liu, H. Zhang, Z. Zhang, Y. Xie, and E. Xie Conversion of p-type to n-type conductivity in undoped ZnO films by increasing operating temperature Appl. Surf. Sci. 257 2010 1236 1238
29. A.A. Tomchenko, G.P. Harmer, B.T. Marquis, and J.W. Allen Semiconducting metal oxide sensor array for the selective detection of combustion gases Sens. Actuators B 93 2003 126 134
30. O. Lupan, V.V. Ursaki, G. Chai, L. Chow, G.A. Emelchenko, I.M. Tiginyanu, A.N. Gruzintsev, and A.N. Redkin Selective hydrogen gas nanosensor using individual ZnO nanowire with fast response at room temperature Sens. Actuators B 144 2010 56 66
31. N. Barsan, and U. Weimar Conduction model of metal oxide gas sensors J. Electroceram. 7 2001 143 167
32. 0.1O multiple quantum wells grown on (1 1 1) Si using buffer assisted pulsed-laser deposition J. Appl. Phys. 107 2010 033102
33. X.H. Pan, W. Guo, Z.Z. Ye, B. Liu, Y. Che, W. Tian, D.G. Schlom, and X.Q. Pan Temperature-dependent Hall and photoluminescence evidence for conduction-band edge shift induced by alloying ZnO with magnesium Appl. Phys. Lett. 95 2009 152105
34. S.M. Sze Physics of Semiconductor Devices 1981 Wiley New York
35. 1-xO (0 ≤ x ≤ 0.22) thin films grown by pulsed laser deposition Thin Solid Films 518 2010 4623 4629
36. Z. Shi, D. Liu, X. Yan, Z. Gao, and S. Bai Effect of oxygen partial pressure on conductivity type of MgZnO nanocrystalline thin films prepared by metal-organic chemical vapor deposition Microelectron. J. 39 2008 1583 1586
37. W. Liu, B. Yao, Y. Li, B. Li, Z. Zhang, C. Shan, J. Zhang, D. Shen, and X. Fan Oxygen partial pressure dependence of the properties of MgZnO thin films during annealing J. Mater. Sci. 2010 1 6