SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 520, Issue 2, 2011, Pages 871-875

An X-ray photoelectron spectroscopy study of ultra-thin oxynitride films

(8) Ladas, S a Sygellou, L a Kennou, S a Wolf, M b Roeder, G b Nutsch, A b Rambach, M c Lerch, W c

a UNIVERSITY OF PATRAS (Greece)

b FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB (Germany)

c Centrotherm Thermal Solutions ^* (Germany)

Author keywords

Plasma nitridation; Silicon oxynitrides; Thickness measurement; Thin films; XPS

Indexed keywords

EXIT ANGLES; INELASTIC MEAN FREE PATH; ITERATIVE PROCEDURES; MATRIX; NITRIDED LAYER; NITROGEN CONTENT; NITROGEN INCORPORATION; OXYNITRIDE FILMS; OXYNITRIDES; PLASMA NITRIDATION; RELATIVE SENSITIVITY FACTOR; SILICON OXYNITRIDES; ULTRA-THIN; X-RAY PHOTOELECTRON SPECTROSCOPY STUDIES;

ELECTRON TRANSPORT PROPERTIES; NITRIDATION; NITRIDES; PHOTOELECTRICITY; PHOTONS; SEMICONDUCTING SILICON COMPOUNDS; SILICON OXIDES; THICKNESS MEASUREMENT; TRANSPORT PROPERTIES; X RAY PHOTOELECTRON SPECTROSCOPY;

PHOTOELECTRON SPECTROSCOPY;

EID: 80755132250 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.04.161 Document Type: Conference Paper

Times cited : (16)

References (15)

1
- 0039436914
- M.L. Green, E.P. Gusev, R. Degraeve, and E.L. Garfunkel J. Appl. Phys. 90 2001 2057
- (2001) J. Appl. Phys. , vol.90 , pp. 2057
- Green, M.L.¹ Gusev, E.P.² Degraeve, R.³ Garfunkel, E.L.⁴

2
- 46649084003
- V.D. Maheta, C. Olsen, K. Ahmed, and S. Mahapatra IEEE Trans. Electron Devices 55 2008 1630
- (2008) IEEE Trans. Electron Devices , vol.55 , pp. 1630
- Maheta, V.D.¹ Olsen, C.² Ahmed, K.³ Mahapatra, S.⁴

3
- 0037439485
- R. Perera, A. Ikeda, R. Hattori, and Y. Kuroki Thin Solid Films 423 2003 212
- (2003) Thin Solid Films , vol.423 , pp. 212
- Perera, R.¹ Ikeda, A.² Hattori, R.³ Kuroki, Y.⁴

4
- 40549134555
- Y. Mitani, H. Satake, and A. Toriumi IEEE Trans. Device Mater. Reliab. 8 2008 6
- (2008) IEEE Trans. Device Mater. Reliab. , vol.8 , pp. 6
- Mitani, Y.¹ Satake, H.² Toriumi, A.³

5
- 0035502945
- K. Watanabe, T. Tatsumi, M. Togo, and T. Mogami J. Appl. Phys. 90 2001 4701
- (2001) J. Appl. Phys. , vol.90 , pp. 4701
- Watanabe, K.¹ Tatsumi, T.² Togo, M.³ Mogami, T.⁴

6
- 77954256249
- L. Sygellou, S. Ladas, and M.A. Reading J. A.van den Berg, T. Conard, S. De Gendt Surf. Interface Anal. 42 2010 1057
- (2010) Surf. Interface Anal. , vol.42 , pp. 1057
- Sygellou, L.¹ Ladas, S.² Reading, M.A.³ Van Den Berg, J.A.⁴ Conard, T.⁵ De Gendt, S.⁶

7
- 0019622512
- C.D. Wagner, L.E. Davis, M.V. Zeller, J.A. Taylor, R.H. Raymond, and L.H. Gale Surf. Interface Anal. 3 1981 211
- (1981) Surf. Interface Anal. , vol.3 , pp. 211
- Wagner, C.D.¹ Davis, L.E.² Zeller, M.V.³ Taylor, J.A.⁴ Raymond, R.H.⁵ Gale, L.H.⁶

8
- 3042631462
- D. Briggs, J.T. Grant, IMPublications Chichester
- M.P. Seah D. Briggs, J.T. Grant, Surface Analysis by Auger and X-ray Photoelectron Spectroscopy 2003 IMPublications Chichester 345
- (2003) Surface Analysis by Auger and X-ray Photoelectron Spectroscopy , pp. 345
- Seah, M.P.¹

9
- 0036606237
- A. Jablonski, and C.J. Powell Surf. Sci. Rep. 47 2002 33
- (2002) Surf. Sci. Rep. , vol.47 , pp. 33
- Jablonski, A.¹ Powell, C.J.²

10
- 0038113157
- M.P. Seah, and S.J. Spencer Surf. Interface Anal. 35 2003 515
- (2003) Surf. Interface Anal. , vol.35 , pp. 515
- Seah, M.P.¹ Spencer, S.J.²

11
- 0036684074
- M.P. Seah, and S.J. Spencer Surf. Interface Anal. 33 2002 640
- (2002) Surf. Interface Anal. , vol.33 , pp. 640
- Seah, M.P.¹ Spencer, S.J.²

12
- 19744383473
- Y. Chung, J.C. Lee, and H.J. Shin Appl. Phys. Lett. 86 2005 022901
- (2005) Appl. Phys. Lett. , vol.86 , pp. 022901
- Chung, Y.¹ Lee, J.C.² Shin, H.J.³

13
- 3042631462
- D. Briggs, J.T. Grant, IMPublications Chichester
- D. Briggs D. Briggs, J.T. Grant, Surface Analysis by Auger and X-ray Photoelectron Spectroscopy 2003 IMPublications Chichester 444
- (2003) Surface Analysis by Auger and X-ray Photoelectron Spectroscopy , pp. 444
- Briggs, D.¹

14
- 44949291961
- F.H.P.M. Habraken, and A.E.T. Kuiper Thin Solid Films 193 194 1990 665
- (1990) Thin Solid Films , vol.193 , Issue.194 , pp. 665
- Habraken, F.H.P.M.¹ Kuiper, A.E.T.²

15
- 80755156203
- S. Tougaard QUASES-Tougaard: Software Package for Quantitative Analysis of Surfaces by Electron Spectrocopy, version 5.0 www.quases.com 2002
- (2002) QUASES-Tougaard: Software Package for Quantitative Analysis of Surfaces by Electron Spectrocopy, Version 5.0
- Tougaard, S.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.